Microelectrode array sensor for water quality monitoring.

A versatile microelectrode array sensor for water quality monitoring has been developed. The array fabrication, based on batch microelectronic processes, results in a highly stable passivation of the silicon chip surface and provides the possibility to use a backside contact. Packaging was optimized for on-line water operation at high pressures. Examples of applications include chlorine monitoring in drinking water, ozone monitoring in deionized water, dissolved oxygen in activated sludge and preliminary measurements of trace arsenic.