RESUMO
This current study aims to enhance the electrostatic MEMS converter performance mainly by boosting its output power. Three different techniques are applied to accomplish such performance enhancement. Firstly, the power is boosted by scaling up the technology of the converter CMOS accompanied circuit, the power conditioning, and power controlling circuits, from 0.35 µm to 0.6 µm CMOS technology. As the converter area is in the range of mm2, there are no restrictions concerning the scaling up of the accompanied converter CMOS circuits. As a result, the maximum voltage of the system for harvesting energy, Vmax, which is the most effective system constraint that greatly affects the converter's output power, increases from 8 V to 30 V. The output power of the designed and simulated converter based on the 0.6 µm technology increases from 2.1 mW to 4.5 mW. Secondly, the converter power increases by optimizing its technological parameters, the converter thickness and the converter finger width and length. Such optimization causes the converter output power to increase from 4.5 mW to 11.2 mW. Finally, the converter structure is optimized to maximize its finger length by using its wasted shuttle mass area which does not contribute to its capacitances and output power. The proposed structure increases the converter output power from 11.2 mW to 14.29 mW. Thus, the three applied performance enhancement techniques boosted the converter output power by 12.19 mW, which is a considerable enhancement in the converter performance. All simulations are carried out using COMSOL Multiphysics 5.4.
RESUMO
In this current study, the validation and evaluation of a behavioral circuit model of electrostatic MEMS converters are presented. The main objective of such a model is to accurately find the converter behavior through the proper choice of its circuit elements. In this regard, the model enables the implementation of the electrostatic MEMS converter using commercially available off-shelf circuit elements. Thus, the overall vibration energy harvesting system can be implemented and tested without the need for fabricating the converter. As a result, the converter performance can be verified and evaluated before its fabrication which saves the expenses of fabricating trailed prototypes. To test the model, we apply it to an enhanced converter in which the conventional electrostatic MEMS converter is modified by depositing the tantalum pentoxide, Ta2O5, a high dielectric constant material, on its fingers' sidewalls. Such a deposition technique causes an appreciable increase in the overall converter capacitance and, in turn, the output power, which is boosted from the range of µw to the range of mW. Next, the converter behavioral circuit model, which is based on representing its capacitances variations with respect to the input displacement, x caused by the vibration signal, C-x curve, is built up. The model is qualitatively validated and quantitatively evaluated. The enhanced converter performance is investigated through the interaction of its model with the power conditioning circuit. From the simulation results, it is revealed that the converter behavioral circuit model accurately accomplishes the vibration energy conversion operation. As a result, the specification of the required controlling pulses for the converter operation is accurately determined. Finally, the model accuracy is validated by calibrating its performance with a traditionally simulated and fabricated electrostatic MEMS converter.
