1.
J Microsc
; 217(Pt 3): 188-92, 2005 Mar.
Artigo
em Inglês
| MEDLINE
| ID: mdl-15725121
RESUMO
We present a technique aiming at sidewall roughness measurement on integrated optical silica waveguides using a scanning electron microscope. The technique uses the principles of stereoscopy to retrieve sidewall topography. Practical implementation details and first results are provided.
2.
Phys Rev B Condens Matter
; 45(24): 14376-14379, 1992 Jun 15.
Artigo
em Inglês
| MEDLINE
| ID: mdl-10001568
3.
4.
Phys Rev B Condens Matter
; 43(3): 2263-2271, 1991 Jan 15.
Artigo
em Inglês
| MEDLINE
| ID: mdl-9997500