Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning.

The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next-generation integrated electronic circuits. Modern transistor architectures for, e.g., FinFETs are realized by lithographic fabrication of complex, well-ordered nanostructures. Recently, a novel characterization technique based on X-ray fluorescence measurements in grazing incidence geometry was proposed for such applications. This technique uses the X-ray standing wave field, arising from an interference between incident and the reflected radiation, as a nanoscale sensor for the dimensional and compositional parameters of the nanostructure. The element sensitivity of the X-ray fluorescence technique allows for a reconstruction of the spatial element distribution using a finite element method. Due to a high computational time, intelligent optimization methods employing machine learning algorithms are essential for timely provision of results. Here, a sampling of the probability distributions by Bayesian optimization is not only fast, but it also provides an initial estimate of the parameter uncertainties and sensitivities. The high sensitivity of the method requires a precise knowledge of the material parameters in the modeling of the dimensional shape provided that some physical properties of the material are known or determined beforehand. The unknown optical constants were extracted from an unstructured but otherwise identical layer system by means of soft X-ray reflectometry. The spatial distribution profiles of the different elements contained in the grating structure were compared to scanning electron and atomic force microscopy and the influence of carbon surface contamination on the modeling results were discussed. This novel approach enables the element sensitive and destruction-free characterization of nanostructures made of silicon nitride and silicon oxide with sub-nm resolution.

Method for direct coupling of a semiconductor quantum dot to an optical fiber for single-photon source applications.

We present an effective method for direct fiber coupling of a quantum dot (QD) that is deterministically incorporated into a cylindrical mesa. For precise positioning of the fiber with respect to the QD-mesa, we use a scanning procedure relying on interference of light reflected back from the fiber end-face and the top surface of the mesa, applicable for both single-mode and multi-mode fibers. The central part of the fiber end-face is etched to control the required distance between the top surface of the mesa and the fiber core. Emission around 1260 nm from a fiber-coupled InGaAs/GaAs QD is demonstrated and its stability is proven over multiple cooling cycles. Moreover, a single photon character of emission from such system for a line emitting above 1200 nm is proven experimentally by photon autocorrelation measurements with an obtained value of the second order correlation function at zero time-delay well below 0.5.

Numerical optimization of the extraction efficiency of a quantum-dot based single-photon emitter into a single-mode fiber.

We present a numerical method for the accurate and efficient simulation of strongly localized light sources, such as quantum dots, embedded in dielectric micro-optical structures. We apply the method in order to optimize the photon extraction efficiency of a single-photon emitter consisting of a quantum dot embedded into a multi-layer stack with further lateral structures. Furthermore, we present methods to study the robustness of the extraction efficiency with respect to fabrication errors and defects.

Inelastic confinement-induced resonances in low-dimensional quantum systems.

A theoretical model is presented describing the confinement-induced resonances observed in the recent loss experiment of Haller et al. [Phys. Rev. Lett. 104, 153203 (2010)]. These resonances originate from possible molecule formation due to the coupling of center-of-mass and relative motion. A corresponding model is verified by ab initio calculations and predicts the resonance positions in 1D as well as in 2D confinement in agreement with the experiment. This resolves the contradiction of the experimental observations to previous theoretical predictions.