[Progress in the application of laser ablation ICP-MS to surface microanalysis in material science].

In the present paper, apparatus and theory of surface analysis is introduced, and the progress in the application of laser ablation ICP-MS to microanalysis in ferrous, nonferrous and semiconductor field is reviewed in detail. Compared with traditional surface analytical tools, such as SEM/EDS (scanning electron microscopy/energy dispersive spectrum), EPMA (electron probe microanalysis analysis), AES (auger energy spectrum), etc. the advantage is little or no sample preparation, adjustable spatial resolution according to analytical demand, multi-element analysis and high sensitivity. It is now a powerful complementary method to traditional surface analytical tool. With the development of LA-ICP-MS technology maturing, more and more analytical workers will use this powerful tool in the future, and LA-ICP-MS will be a super star in elemental analysis field just like LIBS (Laser-induced breakdown spectroscopy).

[Segregation bands analysis of steel sample using laser-induced breakdown spectroscopy].

In the present paper, under optimum experimental condition, two middle-low alloy slab and homogeneous samples were analyzed under the condition of spatial resolution about 100 microm by scanning mode. Element 2D intensity distribution can be converted into 2D concentration distribution via establishing calibration curve. The results showed that there is a central segregation for C, Si, Mn, P, S and Cu for 86 # slab sample, and C, Si, P and Ti for 174 # slab sample, the width of segregation band was estimated, and it agrees well with metallographic analysis. Homogeneous sample was analyzed by scanning mode, the result showed that C, Si, Mn, P, S and so on are well distributed, and there is no segregation band existing. 2D distribution of element intensity or concentration can be used to indirectly reflect sample's homogeneity. Compared with traditional metallographic analysis, LIBS can not only show central segregation bands position and width, but also provide 2D concentration distribution for C, Si, Mn, P, S etc in detail. This method can be used to characterize segregation band position and its width rapidly, and provide theoretical guidance for improving metallurgical process.

[Application progress of laser-induced breakdown spectroscopy for surface analysis in materials science field].

As a truly surface analytical tool, laser-induced breakdown spectroscopy (LIBS) was developed in recent ten years, and in this paper, fundamental theory, instrumentation and it's applications in material science are reviewed in detail. Application progress of elemental distribution and depth profile analysis are mainly discussed in the field of metallurgy, semiconductor and electronical materials at home and abroad. It is pointed out that the pulse energy, ambient gas and it's pressure, and energy distribution of laser beam strongly influence spatial and depth resolution, and meanwhile a approach to improving resolution considering analytical sensitivity is provided. Compared with traditional surface analytical methods, the advantage of LIBS is very large scanning area, high analytical speed, and that conducting materials or non-conducting materials both can be analyzed. It becomes a powerful complement of traditional surface analytical tool.