X-Ray Study of State-of-the-Art Small (d-Spacing W/B4C Multilayers.

Two small d-spacing W/B4C multilayers have been studied at three different x-ray energies CuKα1, AlKα, and FeLα. Measurements of total reflection, specular and mosaic Bragg reflection, and high resolution studies were made at Cu Kα1. Multilayer parameters are deduced from the data and the perfection of the multilayer structure is evaluated by Comparison with model Calculations.