High Frequency MEMS Capacitive Mirror for Space Applications.

Free space optics laser communication using modulating retroreflectors (MR) is a challenging application for an active mirror, due to the high frequencies (>100 kHz) required to enable sufficient data transfer. Micro Electromechanical (MEMS) mirrors are a promising option for high-frequency applications, given the very small moving mass typical of such devices. Capacitive MEMS mirrors are presented here for free space communications, based on a novel fabrication sequence that introduces a single-layer thin film aluminum mirror structure with an underlying silicon oxide sacrificial layer. The use of aluminum instead of gold as a mirror layer diminishes the heating generated by the absorption of the sun's radiation once the mirrors exit the earth's atmosphere. Thanks to the novel fabrication sequence, the presented mirror devices have a full range actuation voltage of less than 40 V, and a high operational frequency with an eigenfrequency above 2 MHz. The devices were manufactured and characterized, and their main parameters were obtained from experimental data combined with finite element analysis, thus enabling future design optimization of the reported MEMS technology. By optical characterization of the far field diffraction pattern, good mirror performance was demonstrated.

Oscillations During Flow Boiling in Single Microchannels.

Flow boiling of degassed double-distilled water in a single 50 × 50 µm and 100 × 50 µm microchannel was investigated on the basis of experimental measurements and high-speed visualization. The visualized events during boiling were analyzed in terms of the bubble frequencies and boiling front oscillations in microchannels. A digital image sequence analysis algorithm was composed to determine the time dependence of bubble and meniscus locations. The results show (i) the dynamic characteristics of boiling in microchannels, (ii) the increase of fundamental oscillation frequencies with increasing heat flux and temperature of the microchannel bottom, (iii) the amplitudes of the flow boiling oscillations are inversely proportional to the fundamental frequencies. The outcomes of the study are important as the oscillations during boiling in single microchannels are experimentally confirmed to be predictable in terms of oscillation frequencies and amplitudes trends and dependencies. This knowledge is especially significant at constructing efficient two-phase micro heat exchangers, micro mixers or micro reactors, as the cross section and the length of the channel become exceedingly important design parameters in micro devices with boiling.