MEMS Differential Pressure Sensor with Dynamic Pressure Canceler for Precision Altitude Estimation.

Atmospheric pressure measurements based on microelectromechanical systems (MEMSs) can extend accessibility to altitude information. A differential pressure sensor using a thin cantilever and an air chamber is a promising sensing element for sub-centimeter resolution. However, its vulnerability to wind and the lack of height estimation algorithms for real-time operation are issues that remain to be solved. We propose a sensor "cap" that cancels the wind effect and noise by utilizing the airflow around a sphere. A set of holes on the spherical cap transmits only the atmospheric pressure to the sensor. In addition, we have developed a height estimation method based on a discrete transfer function model. As a result, both dynamic pressure and noise are suppressed, and height is estimated under a 5 m/s wind, reconstructing the trajectory with an estimation error of 2.8 cm. The developed sensing system enhances height information in outdoor applications such as unmanned aerial vehicles and wave height measurements.

Coaxiality Evaluation of Coaxial Imaging System with Concentric Silicon-Glass Hybrid Lens for Thermal and Color Imaging.

Thermal imaging is useful for tasks such as detecting the presence of humans and recognizing surrounding objects in the operation of several types of robots, including service robots and personal mobility robots, which assist humans. Because the number of pixels on a thermal imager is generally smaller than that on a color imager, thermal images are more useful when combined with color images, assuming that the correspondence between points in the images captured by the two sensors is known. In the literature, several types of coaxial imaging systems have been reported that can capture thermal and color images, simultaneously, from the same point of view with the same optical axis. Among them, a coaxial imaging system using a concentric silicon-glass hybrid lens was devised. Long-wavelength infrared and visible light was focused using the hybrid lens. The focused light was subsequently split using a silicon plate. Separate thermal and color images were then captured using thermal and color imagers, respectively. However, a coaxiality evaluation of the hybrid lens has not been shown. This report proposes an implementation and coaxiality evaluation for a compact coaxial imaging system incorporating the hybrid lens. The coaxiality of the system was experimentally demonstrated by estimating the intrinsic and extrinsic parameters of the thermal and color imagers and performing 2D mapping between the thermal images and color images.

MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever.

This paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse wave measurement. The sensor consists of an air chamber with a thin membrane and a 300-nm thick piezoresistive cantilever placed inside the chamber. When the membrane of the chamber is in contact with the skin above a vessel of a subject, the pulse wave of the subject causes the membrane to deform, leading to a change in the chamber pressure. This pressure change results in bending of the cantilever and change in the resistance of the cantilever, hence the pulse wave of the subject can be measured by monitoring the resistance of the cantilever. In this paper, we report the sensor design and fabrication, and demonstrate the measurement of the pulse wave using the fabricated sensor. Finally, measurement of the pulse wave velocity (PWV) is demonstrated by simultaneously measuring pulse waves at two points using the two fabricated sensor devices. Furthermore, the effect of breath holding on PWV is investigated. We showed that the proposed sensor can be used to continuously measure the PWV for each pulse, which indicates the possibility of using the sensor for continuous blood pressure measurement.

A Tactile Sensor Using Piezoresistive Beams for Detection of the Coefficient of Static Friction.

This paper reports on a tactile sensor using piezoresistive beams for detection of the coefficient of static friction merely by pressing the sensor against an object. The sensor chip is composed of three pairs of piezoresistive beams arranged in parallel and embedded in an elastomer; this sensor is able to measure the vertical and lateral strains of the elastomer. The coefficient of static friction is estimated from the ratio of the fractional resistance changes corresponding to the sensing elements of vertical and lateral strains when the sensor is in contact with an object surface. We applied a normal force on the sensor surface through objects with coefficients of static friction ranging from 0.2 to 1.1. The fractional resistance changes corresponding to vertical and lateral strains were proportional to the applied force. Furthermore, the relationship between these responses changed according to the coefficients of static friction. The experimental result indicated the proposed sensor could determine the coefficient of static friction before a global slip occurs.

Liquid-phase packaging of a glucose oxidase solution with parylene direct encapsulation and an ultraviolet curing adhesive cover for glucose sensors.

We have developed a package for disposable glucose sensor chips using Parylene encapsulation of a glucose oxidase solution in the liquid phase and a cover structure made of an ultraviolet (UV) curable adhesive. Parylene was directly deposited onto a small volume (1 µL) of glucose oxidase solution through chemical vapor deposition. The cover and reaction chamber were constructed on Parylene film using a UV-curable adhesive and photolithography. The package was processed at room temperature to avoid denaturation of the glucose oxidase. The glucose oxidase solution was encapsulated and unsealed. Glucose sensing was demonstrated using standard amperometric detection at glucose concentrations between 0.1 and 100 mM, which covers the glucose concentration range of diabetic patients. Our proposed Parylene encapsulation and UV-adhesive cover form a liquid phase glucose-oxidase package that has the advantages of room temperature processing and direct liquid encapsulation of a small volume solution without use of conventional solidifying chemicals.