Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry.

Optical scatterometry has been given much credit during the past few years in the semiconductor industry. The geometry of an optical diffracted structure is deduced from the scattered intensity by solving an inverse problem. This step always requires a previously defined geometrical model. We develop an artificial neural network classifier whose purpose is to identify the structural geometry of a diffraction grating from its measured ellipsometric signature. This will take place before the characterization stage. Two types of geometry will be treated: sinusoidal and symmetric trapezoidal. Experimental results are performed on two manufactured samples: a sinusoidal photoresist grating deposited on a glass substrate and a trapezoidal grating etched on a SiO2 substrate with periods of 2 microm and 0.565 microm, respectively.

Statistical analysis of absorption spectra of phytoplankton and of pigment concentrations observed during three POMME cruises using a neural network clustering method.

We present a neural network methodology for clustering large data sets into pertinent groups. We applied this methodology to analyze the phytoplankton absorption spectra data gathered by the Laboratoire d'Océanographie de Villefranche. We first partitioned the data into 100 classes by means of a self-organizing map (SOM) and then we clustered these classes into 6 significant groups. We focused our analysis on three POMME campaigns. We were able to interpret the absorption spectra of the samples taken in the first oceanic optical layer during these campaigns, in terms of seasonal variability. We showed that spectra from the PROSOPE Mediterranean campaign, which was conducted in a different region, were strongly similar to those of the POMME-3 campaign. This analysis led us to propose regional empirical relationships, linking phytoplankton absorption spectra to pigment concentrations, that perform better than the previously derived overall relation.

Retrieval of pigment concentrations and size structure of algal populations from their absorption spectra using multilayered perceptrons.

Spectral absorption coefficients of phytoplankton can now be derived, under some assumptions, from hyperspectral ocean color measurements and thus become accessible from space. In this study, multilayer perceptrons have been developed to retrieve information on the pigment composition and size structure of phytoplankton from these absorption spectra. The retrieved variables are the main pigment groups (chlorophylls a, b, c, and photosynthetic and nonphotosynthetic carotenoids) and the relative contributions of three algal size classes (pico-, nano-, and microphytoplankton) to total chlorophyll a. The networks have been trained, tested, and validated using more than 3,700 simultaneous absorption and pigment measurements collected in the world ocean. Among pigment groups, chlorophyll a is the most accurately retrieved (average relative errors of 17% and 16% for the test and validation data subsets, respectively), while the poorest performances are found for chlorophyll b (average relative errors of 51% and 40%). Relative contributions of algal size classes to total chlorophyll a are retrieved with average relative errors of 19% to 33% for the test subset and of 18% to 47% for the validation subset. The performances obtained for the validation data, showing no strong degradation with respect to test data, suggest that these neural networks might be operated with similar performances for a large variety of marine areas.

Statistical analysis of a database of absorption spectra of phytoplankton and pigment concentrations using self-organizing maps.

We present a statistical analysis of a large set of absorption spectra of phytoplankton, measured in natural samples collected from ocean water, in conjunction with detailed pigment concentrations. We processed the absorption spectra with a sophisticated neural network method suitable for classifying complex phenomena, the so-called self-organizing maps (SOM) proposed by Kohonen [Kohonen, Self Organizing Maps (Springer-Verlag, 1984)]. The aim was to compress the information embedded in the data set into a reduced number of classes characterizing the data set, which facilitates the analysis. By processing the absorption spectra, we were able to retrieve well-known relationships among pigment concentrations and to display them on maps to facilitate their interpretation. We then showed that the SOM enabled us to extract pertinent information about pigment concentrations normalized to chlorophyll a. We were able to propose new relationships between the fucoxanthin/Tchl-a ratio and the derivative of the absorption spectrum at 510 nm and between the Tchl-b/Tchl-a ratio and the derivative at 640 nm. Finally, we demonstrate the possibility of inverting the absorption spectrum to retrieve the pigment concentrations with better accuracy than a regression analysis using the Tchl-a concentration derived from the absorption at 440 nm. We also discuss the data coding used to build the self-organizing map. This methodology is very general and can be used to analyze a large class of complex data.

Use of a neuro-variational inversion for retrieving oceanic and atmospheric constituents from satellite ocean colour sensor: application to absorbing aerosols.

This paper presents a new development of the NeuroVaria method. NeuroVaria computes relevant atmospheric and oceanic parameters by minimizing the difference between the observed satellite reflectances and those computed from radiative transfer simulations modelled by artificial neural networks. Aerosol optical properties are computed using the Junge size distribution allowing taking into account highly absorbing aerosols. The major improvement to the method has been to implement an iterative cost function formulation that makes the minimization more efficient. This implementation of NeuroVaria has been applied to sea-viewing wide field-of-view sensor (SeaWiFS) imagery. A comparison with in situ measurements and the standard SeaWiFS results for cases without absorbing aerosols shows that this version of NeuroVaria remains consistent with the former. Finally, the processing of SeaWiFS images of a plume of absorbing aerosols off the US East coast demonstrate the ability of this improved version of NeuroVaria to deal with absorbing aerosols.

Reducing variability that is due to secondary pigments in the retrieval of chlorophyll a concentration from marine reflectance: a case study in the western equatorial Pacific Ocean.

A neural network is developed to retrieve chlorophyll a concentration from marine reflectance by use of the five visible spectral bands of the Sea-viewing Wide Field-of-view Sensor (SeaWiFS). The network, dedicated to the western equatorial Pacific Ocean, is calibrated with synthetic data that vary in terms of atmospheric content, solar zenith angle, and secondary pigments. Pigment variability is based on in situ data collected in the study region and is introduced through nonlinear modeling of phytoplankton absorption as a function of chlorophyll a, b, and c and photosynthetic and photoprotectant carotenoids. Tests performed on simulated yet realistic data show that chlorophyll a retrievals are substantially improved by use of the neural network instead of classical algorithms, which are sensitive to spectrally uncorrelated effects. The methodology is general, i.e., is applicable to regions other than the western equatorial Pacific Ocean.