Deep-level defects induced by implantations of Si and Mg ions into undoped epitaxial GaN.

The properties and concentrations of deep-level defects induced by implantations of Si and Mg ions into unintentionally doped (UID) epitaxial GaN have been revealed by using the Laplace-transform photoinduced transient spectroscopy (LPITS) and molecular dynamics (MD) calculations. The material lattice damage, produced by the Si ions implanted at room temperature in the single process at the energies of 200 and 340 keV, is compared with that produced by the Mg ions implanted in the similar process at the energies of 150, 210, and 270 keV. The LPITS results indicate that the same deep traps with the activation energies of 396, 512, 531, 587, 635, and 736 meV are present in the tail regions of the semi-insulating Si- and Mg-implanted films. It is argued that the predominant implantation-induced point defects in the tail region of the Si-implanted films are nitrogen vacancies, whose concentration is 7.7 × 1017 cm-3. In the Mg-implanted films, the predominant implantation-induced point defects are gallium interstitials, whose concentration is 1.2 × 1 018 cm-3.

The impact of point defects in n-type GaN layers on thermal decomposition of InGaN/GaN QWs.

The aim of this paper is to give an experimental evidence that point defects (most probably gallium vacancies) induce decomposition of InGaN quantum wells (QWs) at high temperatures. In the experiment performed, we implanted GaN:Si/sapphire substrates with helium ions in order to introduce a high density of point defects. Then, we grew InGaN QWs on such substrates at temperature of 730 °C, what caused elimination of most (but not all) of the implantation-induced point defects expanding the crystal lattice. The InGaN QWs were almost identical to those grown on unimplanted GaN substrates. In the next step of the experiment, we annealed samples grown on unimplanted and implanted GaN at temperatures of 900 °C, 920 °C and 940 °C for half an hour. The samples were examined using Photoluminescence, X-ray Diffraction and Transmission Electron Microscopy. We found out that the decomposition of InGaN QWs started at lower temperatures for the samples grown on the implanted GaN substrates what provides a strong experimental support that point defects play important role in InGaN decomposition at high temperatures.

Oxygen out-diffusion and compositional changes in zinc oxide during ytterbium ions bombardment.

Oxygen release and out-diffusion in zinc oxide crystals during heavy ions bombardment has been suggested by many experimental techniques. In this work we have employed secondary ion mass spectrometry to study ZnO implanted with ytterbium ions. Our measurements confirm formation of an oxygen-depleted layer and oxygen out-diffusion and agglomeration at the surface. Moreover, an average compositional change in a heavily damaged near-surface region can also be monitored. This reproducible measurement procedure with subnanometer depth resolution allows to localize precisely these altered layers at the depth of 14-28 nm (oxygen-depleted layer) and 9 nm (maximum of the amorphized region). Such precise measurements may prove to be valuable for further characterization of ion beam induced defects in wide bandgap compound semiconductors and optimization of optoelectronic devices based on these materials.