RESUMO
We exploit the localized surface-plasmon resonance (LSPR) of terahertz gold gammadion structures for wafer scale critical dimension metrology of nanostructures. The proposed characterization method, LSPR spectroscopy, is based on optical transmission measurements and is benchmarked against numerical simulations of imprinted structures characterized by atomic force microscopy. There is a fair agreement between the two methods and the simulations enable the translation of optical spectra to critical dimensions of the physical structures, a concept known from scatterometry. The results demonstrate the potential of LSPR spectroscopy as an alternative characterization method to scanning electron microscopy, atomic force microscopy and scatterometry.
Assuntos
Cristalização/métodos , Ouro/química , Impressão Molecular/métodos , Nanoestruturas/química , Nanoestruturas/ultraestrutura , Análise Espectral/métodos , Ressonância de Plasmônio de Superfície/métodos , Ouro/análise , Teste de Materiais/métodos , Tamanho da Partícula , Propriedades de SuperfícieRESUMO
We propose and describe a microfluidic system for high intensity x-ray measurements. The required open access to a microfluidic channel is provided by an out-of-plane capillary burst valve (CBV). The functionality of the out-of-plane CBV is characterized with respect to the diameter of the windowless access hole, ranging from 10 to 130 microm. Maximum driving pressures from 22 to 280 mbar corresponding to refresh rates of the exposed sample from 300 Hz to 54 kHz is demonstrated. The microfluidic system is tested at beamline ID09b at the ESRF synchrotron radiation facility in Grenoble, and x-ray scattering measurements are shown to be feasible and to require only very limited amounts of sample, <1 ml/h of measurements without recapturing of sample. With small adjustments of the present chip design, scattering angles up to 30 degrees can be achieved without shadowing effects and integration on-chip mixing and spectroscopy appears straightforward.
