Nanoimprinting Solution-Derived Barium Titanate for Electro-Optic Metasurfaces.

Electro-optic metasurfaces have demonstrated significant potential in enhancing the modulation speed and efficiency for fast and large-scale free-space optical devices. Barium titanate has a strong electro-optic Pockels coefficient, but its availability in thin-film form is restricted due to costly growth processes or low thickness. Here, we fabricated active metasurfaces using an etch-free bottom-up process with sol-gel-based polycrystalline barium titanate with a large electro-optic coefficient similar to bulk lithium niobate. We achieve strong hybrid Mie/surface lattice resonances with a quality-factor of 200 at 633 nm wavelength, enhancing the light-matter interaction and therefore the Pockels effect. The metasurface transmission is electro-optically modulated with up to 5 MHz driving frequency at low voltages of less than 1 V thanks to resonant enhancement of the modulation amplitude by 2 orders of magnitude. This successful demonstration of electro-optic modulation in nanoimprinted barium titanate structures paves the way for low-cost and large-scale free-space modulators or tunable metalenses.

Sol-Gel Barium Titanate Nanohole Array as a Nonlinear Metasurface and a Photonic Crystal.

The quest of a nonlinear optical material that can be easily nanostructured over a large surface area is still ongoing. Here, we demonstrate a nanoimprinted nonlinear barium titanate 2D nanohole array that shows the optical properties of a 2D photonic crystal and a metasurface, depending on the direction of the optical axis. The challenge of nanostructuring the inert metal-oxide is resolved by direct soft nanoimprint lithography with sol-gel derived barium titanate enabling critical dimensions of 120 nm with aspect ratios of five. The nanohole array exhibits a photonic bandgap in the infrared range when probed along the slab axis, while lattice resonant states are observed in out-of-plane transmission configuration. The enhanced light-matter interaction from the resonant structure enables to increase in the second-harmonic generation in the near-ultraviolet by a factor of 18 illustrating the potential in the flexible fabrication technique for barium titanate photonic devices.