Piezoelectric Hinged Beam with Arc Mass Stopper for Vibration and Human Motion Energy Harvesting.

Compact reliable structure and strong electromechanical coupling are hot pursuits in piezoelectric vibration energy harvester (PVEH) design. PVEH with a static arc stopper makes piezoelectric stress uniformly distributed and widens the frequency band by collision but wastes space. This Article proposes a hinged PVEH with two arc mass stoppers (AS-H-PVEH). Two arc stoppers as movable masses increase the vibration energy and the effective electromechanical coupling coefficient to achieve strong electromechanical coupling. AS-H-PVEH generates a 4.1 mW power output at 11.6-12.0 Hz and 0.2 g. AS-H-PVEH sustains 4 g acceleration vibration for 10 min without attenuation. To offset the resonance frequency increase caused by arc contact, we discuss the magnetic coupling, and axial force effects are discussed. The design of the arc stopper radius, nonlinear electromechanical coupling model, and system parameter identification method are presented. The displacement varied mechanical quality factor and effective electromechanical coupling coefficient are considered in the modified model for the first time. The model obtained good agreement under experiments. The power generation and driven wireless sensor performance of AS-H-PVEH was verified. This research has important theoretical and application value for the performance optimization of PVEH with an arc stopper.

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging.

Pressure sensors play a vital role in aerospace, automotive, medical, and consumer electronics. Although microelectromechanical system (MEMS)-based pressure sensors have been widely used for decades, new trends in pressure sensors, including higher sensitivity, higher accuracy, better multifunctionality, smaller chip size, and smaller package size, have recently emerged. The demand for performance upgradation has led to breakthroughs in sensor materials, design, fabrication, and packaging methods, which have emerged frequently in recent decades. This paper reviews common new trends in MEMS pressure sensors, including minute differential pressure sensors (MDPSs), resonant pressure sensors (RPSs), integrated pressure sensors, miniaturized pressure chips, and leadless pressure sensors. To realize an extremely sensitive MDPS with broad application potential, including in medical ventilators and fire residual pressure monitors, the "beam-membrane-island" sensor design exhibits the best performance of 66 µV/V/kPa with a natural frequency of 11.3 kHz. In high-accuracy applications, silicon and quartz RPS are analyzed, and both materials show ±0.01%FS accuracy with respect to varying temperature coefficient of frequency (TCF) control methods. To improve MEMS sensor integration, different integrated "pressure + x" sensor designs and fabrication methods are compared. In this realm, the intercoupling effect still requires further investigation. Typical fabrication methods for microsized pressure sensor chips are also reviewed. To date, the chip thickness size can be controlled to be <0.1 mm, which is advantageous for implant sensors. Furthermore, a leadless pressure sensor was analyzed, offering an extremely small package size and harsh environmental compatibility. This review is structured as follows. The background of pressure sensors is first presented. Then, an in-depth introduction to MEMS pressure sensors based on different application scenarios is provided. Additionally, their respective characteristics and significant advancements are analyzed and summarized. Finally, development trends of MEMS pressure sensors in different fields are analyzed.

Fiber optic method for obtaining the peak reflected pressure of shock waves.

Most of fiber-optic pressure sensors used in shock wave measurements are based on deformations of sensing elements. These approaches result in low dynamic pressure ranges for these sensors used in the air. A novel fiber-optic method based on the relationship between pressure and the acceleration of a diaphragm is proposed to obtain peak reflected pressure of shock waves in the air. The optical sensor is designed with a thin circular diaphragm as the sensing element, and the Fabry-Perot optical interferometry is used to detect the acceleration of the diaphragm. Shock tube and explosive-blast experiments prove that the proposed fiber optic method is feasible and has the advantages of no calibration, high precision and fast response time. The proposed fiber-optic pressure method has potential in practical applications for shock wave measurements.