Femtosecond Laser-Induced Phase Transformation on Single-Crystal 6H-SiC.

Silicon carbide (SiC) is widely used in many research fields because of its excellent properties. The femtosecond laser has been proven to be an effective method for achieving high-quality and high-efficiency SiC micromachining. In this article, the ablation mechanism irradiated on different surfaces of 6H-SiC by a single pulse under different energies was investigated. The changes in material elements and the geometric spatial distribution of the ablation pit were analyzed using micro-Raman spectroscopy, Energy Dispersive Spectrum (EDS), and an optical microscope, respectively. Moreover, the thresholds for structural transformation and modification zones of 6H-SiC on different surfaces were calculated based on the diameter of the ablation pits created by a femtosecond laser at different single-pulse energies. Experimental results show that the transformation thresholds of the Si surface and the C surface are 5.60 J/cm2 and 6.40 J/cm2, corresponding to the modification thresholds of 2.26 J/cm2 and 2.42 J/cm2, respectively. The Raman and EDS results reveal that there are no phase transformations or material changes on different surfaces of 6H-SiC at low energy, however, decomposition and oxidation occur and then accumulate into dense new phase material under high-energy laser irradiation. We found that the distribution of structural phase transformation is uneven from the center of the spot to the edge. The content of this research reveals the internal evolution mechanism of high-quality laser processing of hard material 6H-SiC. We expect that this research will contribute to the further development of SiC-based MEMS devices.

A high-precision multi-dimensional microspectroscopic technique for morphological and properties analysis of cancer cell.

Raman and Brillouin scattering are sensitive approaches to detect chemical composition and mechanical elasticity pathology of cells in cancer development and their medical treatment researches. The application is, however, suffering from the lack of ability to synchronously acquire the scattering signals following three-dimensional (3D) cell morphology with reasonable spatial resolution and signal-to-noise ratio. Herein, we propose a divided-aperture laser differential confocal 3D Geometry-Raman-Brillouin microscopic detection technology, by which reflection, Raman, and Brillouin scattering signals are simultaneously in situ collected in real time with an axial focusing accuracy up to 1 nm, in the height range of 200 µm. The divided aperture improves the anti-noise capability of the system, and the noise influence depth of Raman detection reduces by 35.4%, and the Brillouin extinction ratio increases by 22 dB. A high-precision multichannel microspectroscopic system containing these functions is developed, which is utilized to study gastric cancer tissue. As a result, a 25% reduction of collagen concentration, 42% increase of DNA substances, 17% and 9% decrease in viscosity and elasticity are finely resolved from the 3D mappings. These findings indicate that our system can be a powerful tool to study cancer development new therapies at the sub-cell level.

Laser transverse dual differential confocal radius measurement with high efficiency and high precision.

To meet the need for rapid, high-precision, and non-contact measurement of the radius of curvature (ROC) for large quantities of spherical optics, a radius measurement method based on transverse dual differential confocal (TDDC) detection is proposed in this study. First, a template S0 with a known ROC, R0, is axially scanned on its confocal position to obtain the fitted linear function lTDDC(z) using TDDC. Second, the template S0 is replaced by Sn, which is one of the test sample in large quantities, then the single point TDDC intensity ITDDC(Δzn) is captured without scan, which will be applied to obtain the defocus Δzn according to the linear function lTDDC(z). Finally, the ROC Rn under test is calculated using Δzn and R0. Simulation and experiments show that the measurement accuracy can achieve 8.0 ppm, and the measurement efficiency is 60 times higher than that of the traditional differential confocal scanning measurement. Measurement based on TDDC only requires scanning once and replacing Sn N times to realize the fast, high-precision, non-contact ROC detection of N pieces of spherical optics, which enables the high-efficiency and high-precision measurement of large quantities of spherical optics.

Freeform measurement method based on differential confocal and real-time comparison.

To meet the need for the high-precision contactless measurement of the freeform surface profile during the manufacturing, we propose a high-precision measurement method that combines the laser differential confocal trigger sensor (LDCTS) and the real-time comparison method using reference planes (RCMRP). LDCTS is used to measure the freeform surface under test (FSUT), which enables the high-precision measurement of the surface profile with the large roughness and local inclination. Through the real-time comparisons of the coordinate changes of the reference planes and FSUT, the dominant straightness and rotation errors can be separated based on the error model and thus the spatial motion errors can be significantly reduced along all three axes. Combing these two strategies, we find that the inclination measurement capacity becomes larger than 25° and the repeated measurement accuracy is improved to be better than 10 nm within the horizontal scanning range of 150 mm × 150 mm. Compared with the non-RCMRP method, the repeated measurement accuracy is improved by at least 5 times. We believe the proposed method provides a strategy for the high-precision measurement of freeform surface profile with large local inclination and roughness during different manufacturing periods.

Dataset on capability of suppressing background noise and anti-tilting of divided-aperture differential confocal Raman microscopy system.

The dataset describes the mechanism of suppressing the background noise of the divided-aperture differential confocal Raman microscopy system and the range of tilting angles that the system can handle. On the basis of the confocal microscopy (CM), the divided-aperture confocal microscopy divided the pupil plane of the objective lens into the illumination pupil and collection pupil. Compared with the CM, the divided-aperture confocal microscopy only changes the pupil parameters, according to the partially coherent imaging theory, we simulate and analyze the axial response curves of the divided-aperture confocal system and the traditional confocal system. We also simulated the differential confocal response curve at different tilting angles and get the data for the applicability of the differential confocal response curve to see if there is a single zero-crossing point or a good linearity near the zero-crossing point. The goodness-of-fit (GOF) is used to evaluate the accuracy of linear fitting, and can be used as a simple measure method of linearity. And the closer the GOF value is to 1, the higher fitting accuracy is. Through simulation analysis, we can have a better understanding of the advances of divided-aperture differential confocal Raman microscopy.