Model-Based Nonlinear Feedback Controllers for Pressure Control of Soft Pneumatic Actuators Using On/Off Valves.

This article describes the application and comparison of three nonlinear feedback controllers for low-level control of soft actuators driven by a pressure source and single high-speed on/off solenoid valve. First, a mathematical model of the pneumatic system is established and the limitations of the open-loop system are evaluated. Next, a model of the pneumatic system is developed using Simscape Fluids to evaluate the performance of various control strategies. In this article, State-Dependent Riccati Equation control, sliding mode control, and feedback linearization are considered. To improve robustness to model uncertainties, the sliding mode and feedback linearization control strategies are augmented with integral action. The model of the pneumatic system is also used to develop a feedforward component, which is added to a PI controller with anti-windup. The simulation and experimental results demonstrate the effectiveness of the proposed controllers for pressure tracking.

Experimental analysis of tip vibrations at higher eigenmodes of QPlus sensors for atomic force microscopy.

QPlus sensors are non-contact atomic force microscope probes constructed from a quartz tuning fork and a tungsten wire with an electrochemically etched tip. These probes are self-sensing and offer an atomic-scale spatial resolution. Therefore, qPlus sensors are routinely used to visualize the chemical structure of adsorbed organic molecules via the so-called bond imaging technique. This is achieved by functionalizing the AFM tip with a single CO molecule and exciting the sensor at the first vertical cantilever resonance mode. Recent work using higher-order resonance modes has also resolved the chemical structure of single organic molecules. However, in these experiments, the image contrast can differ significantly from the conventional bond imaging contrast, which was suspected to be caused by unknown vibrations of the tip. This work investigates the source of these artefacts by using a combination of mechanical simulation and laser vibrometry to characterize a range of sensors with different tip wire geometries. The results show that increased tip mass and length cause increased torsional rotation of the tuning fork beam due to the off-center mounting of the tip wire, and increased flexural vibration of the tip. These undesirable motions cause lateral deflection of the probe tip as it approaches the sample, which is rationalized to be the cause of the different image contrast. The results also provide a guide for future probe development to reduce these issues.

Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing.

Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide several distinct advantages over conventional cantilever instrumentation. These include clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interference. While cantilever microfabrication technology has continuously advanced over the years, the overall design has remained largely unchanged; a passive rectangular shaped cantilever design has been adopted as the industry wide standard. In this article, we demonstrate multimode AFM imaging on higher eigenmodes as well as bimodal AFM imaging with cantilevers using fully integrated piezoelectric actuation and sensing. The cantilever design maximizes the higher eigenmode deflection sensitivity by optimizing the transducer layout according to the strain mode shape. Without the need for feedthrough cancellation, the read-out method achieves close to zero actuator/sensor feedthrough and the sensitivity is sufficient to resolve the cantilever Brownian motion.

Note: Guaranteed collocated multimode control of an atomic force microscope cantilever using on-chip piezoelectric actuation and sensing.

The quality (Q) factor is an important parameter of the resonance of the microcantilever as it determines both imaging bandwidth and force sensitivity. The ability to control the Q factor of multiple modes is believed to be of great benefit for atomic force microscopy techniques involving multiple eigenmodes. In this paper, we propose a novel cantilever design employing multiple piezoelectric transducers which are used for separated actuation and sensing, leading to guaranteed collocation of the first eight eigenmodes up to 3 MHz. The design minimizes the feedthrough usually observed with these systems by incorporating a guard trace on the cantilever chip. As a result, a multimode Q controller is demonstrated to be able to modify the quality factor of the first two eigenmodes over up to four orders of magnitude without sacrificing robust stability.

Note: An improved low-frequency correction technique for piezoelectric force sensors in high-speed nanopositioning systems.

Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage.

High speed single- and dual-stage vertical positioners.

This article presents a high-speed single- and dual-stage vertical positioners for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6 µm and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10 µm and a first evident resonance frequency of 130 kHz.

High-speed Lissajous-scan atomic force microscopy: scan pattern planning and control design issues.

Tracking of triangular or sawtooth waveforms is a major difficulty for achieving high-speed operation in many scanning applications such as scanning probe microscopy. Such non-smooth waveforms contain high order harmonics of the scan frequency that can excite mechanical resonant modes of the positioning system, limiting the scan range and bandwidth. Hence, fast raster scanning often leads to image distortion. This paper proposes analysis and design methodologies for a nonlinear and smooth closed curve, known as Lissajous pattern, which allows much faster operations compared to the ordinary scan patterns. A simple closed-form measure is formulated for the image resolution of the Lissajous pattern. This enables us to systematically determine the scan parameters. Using internal model controllers (IMC), this non-raster scan method is implemented on a commercial atomic force microscope driven by a low resonance frequency positioning stage. To reduce the tracking errors due to actuator nonlinearities, higher order harmonic oscillators are included in the IMC controllers. This results in significant improvement compared to the traditional IMC method. It is shown that the proposed IMC controller achieves much better tracking performances compared to integral controllers when the noise rejection performances is a concern.

Atomic force microscopy with a 12-electrode piezoelectric tube scanner.

This paper presents a piezoelectric tube scanner with a novel electrode pattern and describes how it may be used for simultaneous sensing and actuation. The electrodes are arranged such that the tube is driven in an antisymmetrical manner, resulting in a collocated system suitable for positive position feedback (PPF). A PPF controller is designed to damp the scanner's resonance. Piezoelectric strain-induced voltage is used as measurement. The device is then installed into an atomic force microscope to obtain open- and closed-loop images of a grating at 10, 15.6, and 31 Hz scan rates. The closed-loop images are noticeably superior to the open-loop images, illustrating the effectiveness of the proposed scanner when used simultaneously as a sensor and an actuator.

Simultaneous sensing and actuation with a piezoelectric tube scanner.

Piezoelectric tube scanners with quartered external electrodes are the most widely used nanopositioning technology in modern scanning probe microscopes. There has been increasing interest in utilizing feedback control techniques to improve bandwidth and accuracy of these nanopositioners. The use of feedback requires a sensor to be incorporated into the nanopositioning device. Noncontact displacement sensors, e.g., capacitive and inductive sensors, have been used for this purpose. However, their measurements contain a significant noise component if operated over large bandwidths. The piezoelectric voltage induced in a tube nanopositioner has been proposed recently as an alternative measure of displacement with a much improved noise figure, up to three orders of magnitude better than capacitive sensors. In this arrangement, an electrode is used to actuate the tube, while the opposite electrode is used as a sensor. This approach has two drawbacks: (i) the operating range of the tube is reduced to half and (ii) the tube is not driven symmetrically, thus the opposite sides of the tube experience asymmetric stresses, i.e., in this mode of operation, the scanner is not a perfectly collocated system. In this paper, we present a new electrode pattern for piezoelectric tube scanners which addresses the above problems and allows simultaneous sensing and actuation of the tube in an efficient way.