High-efficiency thermo-optic control of a longitudinal radiation angle in a silicon-based optical phased array by leveraging the backside air trench structure.

We proposed a 2D 1 × 64 silicon optical phased array with a backside silicon-etched structure to achieve high tuning efficiency and a wide longitudinal steering range. At the radiator array, the n-i-n heater was implemented to steer the light in a longitudinal direction through the thermo-optic effect. The deep reactive ion etching process was utilized to generate the 600 µm depth air trench with a 1.8 cm2 area from the backside of the radiator array. We achieved almost 100% increment in terms of tuning efficiency, which is 1.56°/W for the proposed structure and 0.78°/W for the conventional structure.