RESUMO
A high-resolution laboratory reflectometer designed for operation in the soft x-ray (SXR) and extreme ultraviolet (EUV) ranges is described. High spectral resolution, up to 0.028 nm, in a wide spectral range is achieved due to the Czerny-Turner monochromator. A laser plasma generated by irradiating a solid-state target with a focused laser beam (wavelength 1.06 µm, pulse energy 0.5 J, duration 4 ns, and pulse repetition rate 10 Hz) is used as a source of SXR and EUV radiation. The goniometer allows the study of curved optical elements with an aperture up to NA = 0.5 and a diameter of up to 500 mm. The methods providing high efficiency of the optical system and spectral resolution in a wide range of wavelengths are described in detail. The problem of taking into account high orders in the recorded spectra of a laser plasma is discussed. A comparison of the measurement results with the described reflectometer and the optics beamline at the BESSY-II synchrotron is given.
RESUMO
An electron-beam deposition method is used to fabricate spherical and flat mirrors with a peak reflectivity of 20% for wavelengths between 120 and 450 Å. It is experimentally shown that the fabricated mirrors can be employed to form an image with a resolution of 1 µm for ultrasoft x rays. The possibility of producing intense directional high-temperature plasma radiation by spherical multilayer mirrors is demonstrated. A radiation intensity of 107 W/cm2 around 182 Å has been experimentally obtained in the laser plasma image plane.
