Vibration Analysis of Porous Cu-Si Microcantilever Beams in Fluids Based on Modified Couple Stress Theory.

The vibrations in functionally graded porous Cu-Si microcantilever beams are investigated based on physical neutral plane theory, modified coupled stress theory, and scale distribution theory (MCST&SDT). Porous microcantilever beams define four pore distributions. Considering the physical neutral plane theory, the material properties of the beams are computed through four different power-law distributions. The material properties of microcantilever beams are corrected by scale effects based on modified coupled stress theory. Considering the fluid driving force, the amplitude-frequency response spectra and resonant frequencies of the porous microcantilever beam in three different fluids are obtained based on the Euler-Bernoulli beam theory. The quality factors of porous microcantilever beams in three different fluids are derived by estimating the equation. The computational analysis shows that the presence of pores in microcantilever beams leads to a decrease in Young's modulus. Different pore distributions affect the material properties to different degrees. The gain effect of the scale effect is weakened, but the one-dimensional temperature field and amplitude-frequency response spectra show an increasing trend. The quality factor is decreased by porosity, and the degree of influence of porosity increases as the beam thickness increases. The gradient factor n has a greater effect on the resonant frequency. The effect of porosity on the resonant frequency is negatively correlated when the gradient factor is small (n<1) but positively correlated when the gradient factor is large (n>1).

Direct Fabrication of Microcantilever Structures with High Shape Accuracy Using Projection-Based Stereolithography.

Microcantilever structures such as microgears play an important role in precision mechanisms, where highly accurate cantilever characteristics guarantee the reliable function of these structures. Projection-based stereolithography (PSL) technology is widely used to fabricate sophisticated microstructures owing to its high precision and remarkable efficiency, and plenty of works have been done to improve the precision of structures with macroscale. However, the shape accuracy of microcantilever structures fabricated through PSL process is always neglected, which severely hinders its application in precision mechanisms. In this work, we investigated the influence of major factors on the shape accuracy of microcantilever structures in PSL process through orthogonal tests. Different resin materials were tested to investigate the influence of material properties. Printing experiments showed that for a given PSL system, microcantilever structures with confined size could be directly and accurately manufactured using a set of optimized processing parameters, which dramatically speed up the production process and effectively improved the reliability of microcantilevers. This work provides a comprehensive understanding of the capability of PSL to fabricate microcantilever structures and guides the manufacturing processes of micromechanisms with cantilever features, which effectually promotes the industrial application of PSL technology.

MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA.

Micromechanical resonators have aroused growing interest as biological and chemical sensors, and microcantilever beams are the main research focus. Recently, a resonant microcantilever with an integrated heater has been applied in on-chip thermogravimetric analysis (TGA). However, there is a strong relationship between the mass sensitivity of a resonant microcantilever and the location of adsorbed masses. Different sampling positions will cause sensitivity differences, which will result in an inaccurate calculation of mass change. Herein, an integrated H-shaped resonant beam with uniform mass sensitivity and temperature distribution is proposed and developed to improve the accuracy of bio/chemical sensing and TGA applications. Experiments verified that the presented resonant beam possesses much better uniformity of sensitivity and temperature distribution compared with resonant microcantilevers. Gas-sensing and TGA experiments utilizing the integrated resonant beam were also carried out and exhibited good measurement accuracy.

Optimization of Newtonian fluid pressure in microcantilever integrated flexible microfluidic channel for healthcare application.

The demand for microfluidic pressure sensors is ever-increasing in various industries due to their crucial role in controlling fluid pressure within microchannels. While syringe pump setups have been traditionally used to regulate fluid pressure in microfluidic devices, they often result in larger setups that increase the cost of the device. To address this challenge and miniaturize the syringe pump setup, the researcher introduced integrated T-microcantilever-based microfluidic devices. In these devices, microcantilevers are incorporated, and their deflections correlate with the microchannel's pressure. When the relative pressure of fluid (plasma) changes, the T-microcantilever deflects, and the extent of this deflection provides information on fluid pressure within the microchannel. In this work, finite element method (FEM) based simulation was carried out to investigate the role of material, and geometric parameters of the cantilever, and the fluid viscosity on the pressure sensing capability of the T-microcantilever integrated microfluidic channel. The T-microcantilever achieves a maximum deflection of 127µm at a 5000µm/s velocity for Young's modulus(E) of 360 kPa of PDMS by employing a hinged structure. On the other hand, a minimum deflection of 4.05 × 10-5µm was attained at 5000µm/s for Young's modulus of 1 TPa for silicon. The maximum deflected angle of the T-cantilever is 20.46° for a 360 kPa Young's modulus while the minimum deflection angle of the T-cantilever is measured at 13.77° for 900 KPa at a fluid velocity of 5000µm s-1. The T-cantilever functions as a built-in microchannel that gauges the fluid pressure within the microchannel. The peak pressure, set at 8.86 Pa on the surface of the cantilever leads to a maximum deflection of 0.096µm (approximately 1µm) in the T-cantilever at a 1:1 velocity ratio. An optimized microfluidic device embedded with microchannels can optimize fluid pressure in a microchannel support cell separation.

Quantitative Detection of Biological Nanovesicles in Drops of Saliva Using Microcantilevers.

Extracellular nanovesicles (EVs) are lipid-based vesicles secreted by cells and are present in all bodily fluids. They play a central role in communication between distant cells and have been proposed as potential indicators for the early detection of a wide range of diseases, including different types of cancer. However, reliable quantification of a specific subpopulation of EVs remains challenging. The process is typically lengthy and costly and requires purification of relatively large quantities of biopsy samples. Here, we show that microcantilevers operated with sufficiently small vibration amplitudes can successfully quantify a specific subpopulation of EVs directly from a drop (0.1 mL) of unprocessed saliva in less than 20 min. Being a complex fluid, saliva is highly non-Newtonian, normally precluding mechanical sensing. With a combination of standard rheology and microrheology, we demonstrate that the non-Newtonian properties are scale-dependent, enabling microcantilever measurements with a sensitivity identical to that in pure water when operating at the nanoscale. We also address the problem of unwanted sensor biofouling by using a zwitterionic coating, allowing efficient quantification of EVs at concentrations down to 0.1 µg/mL, based on immunorecognition of the EVs' surface proteins. We benchmark the technique on model EVs and illustrate its potential by quantifying populations of natural EVs commonly present in human saliva. The method effectively bypasses the difficulty of targeted detection in non-Newtonian fluids and could be used for various applications, from the detection of EVs and viruses in bodily fluids to the detection of molecular clusters or nanoparticles in other complex fluids.

Phase-Specific Damage Tolerance of a Eutectic High Entropy Alloy.

Phase-specific damage tolerance was investigated for the AlCoCrFeNi2.1 high entropy alloy with a lamellar microstructure of L12 and B2 phases. A microcantilever bending technique was utilized with notches milled in each of the two phases as well as at the phase boundary. The L12 phase exhibited superior bending strength, strain hardening, and plastic deformation, while the B2 phase showed limited damage tolerance during bending due to micro-crack formation. The dimensionalized stiffness (DS) of the L12 phase cantilevers were relatively constant, indicating strain hardening followed by increase in stiffness at the later stages and, therefore, indicating plastic failure. In contrast, the B2 phase cantilevers showed a continuous drop in stiffness, indicating crack propagation. Distinct differences in micro-scale deformation mechanisms were reflected in post-compression fractography, with L12-phase cantilevers showing typical characteristics of ductile failure, including the activation of multiple slip planes, shear lips at the notch edge, and tearing inside the notch versus quasi-cleavage fracture with cleavage facets and a river pattern on the fracture surface for the B2-phase cantilevers.

Tailored Microcantilever Optimization for Multifrequency Force Microscopy.

Microcantilevers are at the heart of atomic force microscopy (AFM) and play a significant role in AFM-based techniques. Recent advancements in multifrequency AFM require the simultaneous excitation and detection of multiple eigenfrequencies of microcantilevers to assess more data channels to quantify the material properties. However, to achieve higher spatiotemporal resolution there is a need to optimize the structure of microcantilevers. In this study, the architecture of the cantilever with gold nanoparticles using a dip-coating method is modified, aiming to tune the higher eigenmodes of the microcantilever as integer multiples of its fundamental frequency. Through the theoretical methodology and simulative model, that integer harmonics improve the coupling in multifrequency AFM measurements is demonstrated, leading to enhanced image quality and resolution. Furthermore, via the combined theoretical-experimental approach, the interplay between induced mass and stiffness change of the modified cantilever depending on the attached particle location, size, mass, and geometry is found. To validate the results of this predictive model, tapping-mode AFM is utilized and bimodal Amplitude Modulation AFM techniques to examine and quantify the impact of tuning higher-order eigenmodes on the imaging quality of a polystyrene-polymethylmethacrylate (PS-PMMA) block co-polymer assembly deposited on a glass slide and Highly Ordered Pyrolytic Graphite (HOPG).

Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection.

This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than other parts under applied voltage bias. The sensor response was found to vary linearly with airflow rate when tested over a range of airflow varying from 16 to 2000 sccm. The noise-limited flow volume measurement yielded ~4 sccm resolution, while the velocity resolution was found to be 0.241 cm/s, which is one of the best reported so far for thermal sensors. The sensor was able to operate at a very low power consumption level of ~5 mW, which is one of the lowest reported for these types of sensors. The intrinsic response time of the sensor was estimated to be on the order of a few ms, limited by its thermal properties. Overall, the microcantilever sensor, with its simple geometry and measurement configurations, was found to exhibit attractive performance metrics useful for various sensing applications.

Design and numerical study of a bidirectional acoustic microfluidic pump enabled by microcantilever arrays.

Microfluidics offers a versatile and promising platform for various applications in biomedical and other fields, boasting cost-effectiveness, rapid analysis time, and a compact equipment footprint. However, achieving controlled and versatile microfluidic motion within implantable devices presents a significant challenge. In this study, we propose a novel bidirectional micro-pump design that leverages two sharp-edge microcantilever arrays, driven by ultrasound, to enable selective flow direction by manipulating the ultrasound frequency. Through systematic numerical simulation, we demonstrate the feasibility of this design and further optimize its performance through comprehensive parametric analysis. This work provides valuable guidance for the practical development of sharp-edge-based acoustic micro-pumps, particularly for potential implantable applications such as controlled drug release and in vivo sampling for advanced diagnostics.

Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection.

In this paper, novel humidity sensors based on montmorillonite, kaolinite, and composite films coated on micro-cantilevers were prepared to measure the relative humidity (RH) values by the deflection of a micro-cantilever (MC) at room temperature. The humidity-sensing properties, such as response and recovery, sensitivity, repeatability, humidity hysteresis, and long-term stability, were investigated in the range of working humidity (10-80% RH). The humidity response in the close humidity range of 10% RH to 80% RH revealed a linear increase in water absorption of montmorillonite, kaolinite, and montmorillonite/kaolinite mixed dispersant (1:1) as a function of RH with linear correlation factors between the humidity change and deflection estimated to be 0.994, 0.991, and 0.946, respectively. Montmorillonite's sensitivity was better than kaolinite's, with the mixed-clay mineral film's response falling somewhere in between. This research provides a feasible and effective approach to constructing high-performance MC humidity sensors that can be operated at room temperature based on clay minerals.

Mimicking the Tendon Microenvironment to Enhance Skeletal Muscle Adhesion and Longevity in a Functional Microcantilever Platform.

Microcantilever platforms are functional models for studying skeletal muscle force dynamics in vitro. However, the contractile force generated by the myotubes can cause them to detach from the cantilevers, especially during long-term experiments, thus impeding the chronic investigations of skeletal muscles for drug efficacy and toxicity. To improve the integration of myotubes with microcantilevers, we drew inspiration from the elastomeric proteins, elastin and resilin, that are present in the animal and insect worlds, respectively. The spring action of these proteins plays a critical role in force dampening in vivo. In animals, elastin is present in the collagenous matrix of the tendon which is the attachment point of muscles to bones. The tendon microenvironment consists of elastin, collagen, and an aqueous jelly-like mass of proteoglycans. In an attempt to mimic this tendon microenvironment, elastin, collagen, heparan sulfate proteoglycan, and hyaluronic acid were deposited on a positively charged silane substrate. This enabled the long-term survival of mechanically active myotubes on glass and silicon microcantilevers for over 28 days. The skeletal muscle cultures were derived from both primary and induced pluripotent stem cell (iPSC)-derived human skeletal muscles. Both types of myoblasts formed myotubes which survived for five weeks. Primary skeletal muscles and iPSC-derived skeletal muscles also showed a similar trend in fatigue index values. Upon integration with the microcantilever system, the primary muscle and iPSC-derived myotubes were tested successively over a one month period, thus paving the way for long-term chronic experiments on these systems for both drug efficacy and toxicity studies.

An Engineering Method for Resonant Microcantilever Using Double-Channel Excitation and Signal Acquisition Based on LabVIEW.

Resonant microcantilevers have the advantages of ultra-high heating rates, analysis speed, ultra-low power consumption, temperature programming, and trace sample analysis when applied in TGA. However, the current single-channel testing system for resonant microcantilevers can only detect one sample at a time, and need two program heating tests to obtain the thermogravimetric curve of a sample. In many cases, it is desirable to obtain the thermogravimetric curve of a sample with a single-program heating test and to simultaneously detect multiple microcantilevers for testing multiple samples. To address this issue, this paper proposes a dual-channel testing method, where a microcantilever is used as a control group and another microcantilever is used as an experimental group, to obtain the thermal weight curve of the sample in a single program temperature ramp test. With the help of the LabVIEW's convenient parallel running method, the functionality of simultaneously detecting two microcantilevers is achieved. Experimental validation showed that this dual-channel testing system can obtain the thermogravimetric curve of a sample with a single program heating test and detect two types of samples simultaneously.

Nonlinear Dynamic Response of Nanocomposite Microbeams Array for Multiple Mass Sensing.

A nonlinear MEMS multimass sensor is numerically investigated, designed as a single input-single output (SISO) system consisting of an array of nonlinear microcantilevers clamped to a shuttle mass which, in turn, is constrained by a linear spring and a dashpot. The microcantilevers are made of a nanostructured material, a polymeric hosting matrix reinforced by aligned carbon nanotubes (CNT). The linear as well as the nonlinear detection capabilities of the device are explored by computing the shifts of the frequency response peaks caused by the mass deposition onto one or more microcantilever tips. The frequency response curves of the device are obtained by a pathfollowing algorithm applied to the reduced-order model of the system. The microcantilevers are described by a nonlinear Euler-Bernoulli inextensible beam theory, which is enriched by a meso-scale constitutive law of the nanocomposite. In particular, the microcantilever constitutive law depends on the CNT volume fraction suitably used for each cantilever to tune the frequency bandwidth of the whole device. Through an extensive numerical campaign, the mass sensor sensitivity estimated in the linear and nonlinear dynamic range shows that, for relatively large displacements, the accuracy of the added mass detectability can be improved due to the larger nonlinear frequency shifts at resonance (up to 12%).

Optical Fiber-Based Polymer Microcantilever for Chemical Sensing: A Through-Fiber Fabrication Scheme.

Fiber optics offer an emerging platform for chemical and biological sensors when engineered with appropriate materials. However, the large aspect ratio makes the optical fiber a rather challenging substrate for standard microfabrication techniques. In this work, the cleaved end of an optical fiber is used as a fabrication platform for cantilever sensors based on functional polymers. The through-fiber fabrication process is triggered by photo-initiated free-radical polymerization and results in a high-aspect-ratio polymer beam in a single step. The dynamic mode application of these cantilevers is first demonstrated in air. These cantilevers are then tuned for sensing applications, including humidity and chemical sensing based on molecularly imprinted polymers.

Self-Excited Microcantilever with Higher Mode Using Band-Pass Filter.

Microresonators have a variety of scientific and industrial applications. The measurement methods based on the natural frequency shift of a resonator have been studied for a wide range of applications, including the detection of the microscopic mass and measurements of viscosity and stiffness. A higher natural frequency of the resonator realizes an increase in the sensitivity and a higher-frequency response of the sensors. In the present study, by utilizing the resonance of a higher mode, we propose a method to produce the self-excited oscillation with a higher natural frequency without downsizing the resonator. We establish the feedback control signal for the self-excited oscillation using the band-pass filter so that the signal consists of only the frequency corresponding to the desired excitation mode. It results that careful position setting of the sensor for constructing a feedback signal, which is needed in the method based on the mode shape, is not necessary. By the theoretical analysis of the equations governing the dynamics of the resonator coupled with the band-pass filter, it is clarified that the self-excited oscillation is produced with the second mode. Furthermore, the validity of the proposed method is experimentally confirmed by an apparatus using a microcantilever.

A Genosensor Based on the Modification of a Microcantilever: A Review.

When the free end of a microcantilever is modified by a genetic probe, this sensor can be used for a wider range of applications, such as for chemical analysis, biological testing, pharmaceutical screening, and environmental monitoring. In this paper, to clarify the preparation and detection process of a microcantilever sensor with genetic probe modification, the core procedures, such as probe immobilization, complementary hybridization, and signal extraction and processing, are combined and compared. Then, to reveal the microcantilever's detection mechanism and analysis, the influencing factors of testing results, the theoretical research, including the deflection principle, the establishment and verification of a detection model, as well as environmental influencing factors are summarized. Next, to demonstrate the application results of the genetic-probe-modified sensors, based on the classification of detection targets, the application status of other substances except nucleic acid, virus, bacteria and cells is not introduced. Finally, by enumerating the application results of a genetic-probe-modified microcantilever combined with a microfluidic chip, the future development direction of this technology is surveyed. It is hoped that this review will contribute to the future design of a genetic-probe-modified microcantilever, with further exploration of the sensitive mechanism, optimization of the design and processing methods, expansion of the application fields, and promotion of practical application.

A review of piezoelectric MEMS sensors and actuators for gas detection application.

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors' characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal-organic framework, and graphene.

Gas Adsorption Response of Piezoelectrically Driven Microcantilever Beam Gas Sensors: Analytical, Numerical, and Experimental Characterizations.

This work presents an approach for the estimation of the adsorbed mass of 1,5-diaminopentane (cadaverine) on a functionalized piezoelectrically driven microcantilever (PD-MC) sensor, using a polynomial developed from the characterization of the resonance frequency response to the known added mass. This work supplements the previous studies we carried out on the development of an electronic nose for the measurement of cadaverine in meat and fish, as a determinant of its freshness. An analytical transverse vibration analysis of a chosen microcantilever beam with given dimensions and desired resonance frequency (>10 kHz) was conducted. Since the beam is considered stepped with both geometrical and material non-uniformity, a modal solution for stepped beams, extendable to clamped-free beams of any shape and structure, is derived and used for free and forced vibration analyses of the beam. The forced vibration analysis is then used for transformation to an equivalent electrical model, to address the fact that the microcantilever is both electronically actuated and read. An analytical resonance frequency response to the mass added is obtained by adding simulated masses to the free end of the beam. Experimental verification of the resonance frequency response is carried out, by applying known masses to the microcantilever while measuring the resonance frequency response using an impedance analyzer. The obtained response is then transformed into a resonance frequency to the added mass response polynomial using a polynomial fit. The resulting polynomial is then verified for performance using different masses of cantilever functionalization solution. The functionalized cantilever is then exposed to different concentrations of cadaverine while measuring the resonance frequency and mass of cadaverine adsorbed estimated using the previously obtained polynomial. The result is that there is the possibility of using this approach to estimate the mass of cadaverine gas adsorbed on a functionalized microcantilever, but the effectiveness of this approach is highly dependent on the known masses used for the development of the response polynomial model.

Sub-Nanometer Acoustic Vibration Sensing Using a Tapered-Tip Optical Fiber Microcantilever.

We demonstrate a highly sensitive acoustic vibration sensor based on a tapered-tip optical fiber acting as a microcantilever. The tapered-tip fiber has a unique output profile that exhibits a circular fringe pattern, whose distribution is highly sensitive to the vibration of the fiber tip. A piezo transducer is used for the acoustic excitation of the fiber microcantilever, which results in a periodic bending of the tip and thereby a significant output power modulation. Using a multimode readout fiber connected to an electric spectrum analyzer, we measured the amplitude of these power modulations over the 10-50 kHz range and observed resonances over certain frequency ranges. Two types of tapered-tip fibers were fabricated with diameter values of 1.5 µm and 1.8 µm and their frequency responses were compared with a non-tapered fiber tip. Thanks to the resonance effect as well as the sensitive fringe pattern of the tapered-tip fibers, the limit of detection and the sensitivity of the fiber sensor were obtained as 0.1 nm and 15.7 V/nm, respectively, which were significantly better than the values obtained with the non-tapered fiber tip (i.e., 1.1 nm and 0.12 V/nm, respectively). The sensor is highly sensitive, easy to fabricate, low-cost, and can detect sub-nanometer displacements, which makes it a promising tool for vibration sensing, particularly in the photoacoustic sensing of greenhouse gases.

Cooperative Characterization of In Situ TEM and Cantilever-TGA to Optimize Calcination Conditions of MnO2 Nanowire Precursors.

Calcination plays a vital role during material preparation. However, the calcination conditions have often been determined empirically or have been based on trial and error. Herein we present a cooperative characterization approach to optimize calcination conditions by gas-cell in situ TEM in collaboration with microcantilever-based thermogravimetric analysis (cantilever-TGA) techniques. The morphological evolution of precursors under atmospheric conditions is observed with in situ TEM, and the right calcination temperature is provided by cantilever-TGA. The proposed approach successfully optimizes the calcination conditions of fragile MnO2 nanowire precursors with multiple valence products. The cantilever-TGA shows that a calcination temperature above 560 °C is required to transform the MnO2 precursor to Mn3O4 under an N2 atmosphere, but the in situ TEM indicates that the nanowire structure is destroyed within only 30 min under calcination conditions. Our method further suggests that heating the precursor at 400 °C using an H2-containing atmosphere can produce Mn3O4 nanowires with good electrical properties.