An experimental and theoretical high temperature kinetic study of the thermal unimolecular dissociation of fluoroethane.

The thermal dissociation of fluoroethane has been studied using shock tube (ST)/time-of-flight mass spectrometry (TOF-MS) at 500 and 1200 Torr over the temperature range 1200-1550 K. The ST/TOF-MS experiments confirm that elimination of HF is the only reaction channel and rate coefficients for this reaction were extracted from concentration/time profiles derived from the mass spectra. Results from a novel diaphragmless shock tube coupled to the TOF-MS are also presented and demonstrate the unique ability of this apparatus to generate sufficiently reproducible shock waves that signal averaging can be performed over multiple experiments; something that is not possible with a conventional shock tube. The dissociation is also studied with ab initio transition state theory based master equation simulations. A modest increase in the calculated barrier height (i.e., by 1 kcal mol(-1)) yields predicted high pressure rate coefficients that are in good agreement with the existing literature data. The present pressure dependent observations are accurately reproduced for a downwards energy transfer for neon at 1200 to 1500 K of approximately 270 cm(-1), which is somewhat smaller than that found in previous studies on fluorinated ethanes with the same bath gases.

Efficient control system for low-concentration inorganic gases from a process vent stream: application of surfactants in spray and packed columns.

Control of low-concentration pollutants from a semiconductor process vent stream using a wet-scrubbing technique is a challenging task to meet Taiwan environmental emission standards. An efficient wet-scrubber is designed on a pilot scale and tested to control low concentration acid and base waste-gas emission. The scrubber system consisted of two columns, i.e., a fine spray column [cutoff diameter (based on volume), Dv(50) = 15.63 microm; Sauter mean diameter (SMD) = 7.62 microm], which is especially efficient for NH3 removal as the pH of the spraying liquid is approximately 7 followed by a packed column with a scrubbing liquid pH approximately 9.0 mainly for acids removal. It is observed that use of the surfactants in low concentration about 10(-4) M and 10(-7) M in the spray liquid and in the scrubbing liquid, respectively, remarkably enhances the removal efficiency of the system. A traditional packed column (without the spray column and the surfactant) showed that the removal efficiencies of NH3, HF, and HCl for the inlet concentration range 0.2 to 3 ppm were (n = 5) 22.6+/-3.4%, 43.4+/-5.5%, and 40.4+/-7.4%, respectively. The overall efficiencies of the proposed system (the spray column and the packed column) in the presence of the surfactant in the spray liquid and in the scrubbing liquid forthese three species were found to increase significantly (n = 5) from 60.3+/-3.6 to 82.8+/-6.8%, 59.1+/-2.7 to 83.4+/-4.2%, and 56.2+/-7.3 to 81.0+/-6.7%, respectively. In this work, development of charge on the gas-liquid interface due to the surfactants has been measured and discussed. It is concluded that the presence of charge on the gas-liquid interface is the responsible factor for enhancement of the removal efficiency (mass-transfer in liquid phase). The effects of the type of surfactants, their chain length, concentration in liquid, etc. on the removal efficiency are discussed. Since the pilot tests were performed under the operating conditions similar to most of the wet-scrubbers operated in semiconductors manufacturing facilities for inorganic pollutants, this study can be applied to modify the existing wet-scrubbers to enhance the removal efficiencies, especially for low-concentration pollutants.