Personal fluoride and solvent exposures, and their determinants, in semiconductor manufacturing.
Appl Occup Environ Hyg
; 15(4): 354-61, 2000 Apr.
Article
em En
| MEDLINE
| ID: mdl-10750279
ABSTRACT
Personal air sampling for fluorides and solvents was done at 35 semiconductor fabrication facilities in the United States. Fluoride compounds were used in etching and cleaning operations, and solvents were used in photoresist and developing operations. All personal solvent and fluoride levels were less than 2 percent of current Occupational Safety and Health Administration (OSHA) standards. Statistical models of the exposure determinants for the target agents found production level, as indicated by number of semiconductor wafer cassettes loaded/unloaded from the target machines or baths, was predictive of fluoride, xylene and 1-methoxy-2-propyl acetate exposures. The percent of fresh air ventilation and the percent of xylene in the photoresist were also significant determinants in the statistical model predicting personal xylene exposure levels.
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Coleções:
01-internacional
Base de dados:
MEDLINE
Assunto principal:
Solventes
/
Indústria Química
/
Monitoramento Ambiental
/
Exposição Ocupacional
/
Poluentes Ocupacionais do Ar
/
Fluoretos
Tipo de estudo:
Diagnostic_studies
/
Prognostic_studies
/
Risk_factors_studies
Limite:
Humans
País/Região como assunto:
America do norte
Idioma:
En
Revista:
Appl Occup Environ Hyg
Assunto da revista:
MEDICINA OCUPACIONAL
/
SAUDE AMBIENTAL
Ano de publicação:
2000
Tipo de documento:
Article
País de afiliação:
Estados Unidos