Molybdenum-strontium multilayer mirrors for the 8-12-nm extreme-ultraviolet wavelength region.
Opt Lett
; 26(7): 468-70, 2001 Apr 01.
Article
em En
| MEDLINE
| ID: mdl-18040356
ABSTRACT
Mo-Sr multilayer mirrors were successfully deposited by dc-magnetron sputtering and characterized in situ with synchrotron radiation. Normal-incidence (3.6 degrees ) reflectance of 23.0% at 8.8 nm, 40.8% at 9.4 nm, and 48.3% at 10.5 nm were measured before the samples were exposed to air. After exposure, as a result of the reactivity of Sr with oxygen and water vapor, the reflectance of these multilayers decreased rapidly. Attempts to use thin layers of C to passivate the surface of these Mo-Sr multilayers were unsuccessful.
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01-internacional
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MEDLINE
Idioma:
En
Revista:
Opt Lett
Ano de publicação:
2001
Tipo de documento:
Article