Fabrication of high-spatial-frequency gratings through computer-generated near-field holography.
Opt Lett
; 24(9): 602-4, 1999 May 01.
Article
em En
| MEDLINE
| ID: mdl-18073796
ABSTRACT
We demonstrate an innovative method for fabrication of high-spatial-frequency grating structures. This technique makes use of the near-field diffraction patterns from computer-generated phase holograms for lithographic fabrication of grating structures with periods that are one half that of the phase hologram mask. Linear, rectilinear, and circular gratings were fabricated with this technique. Experimental results from gratings with periods to 0.5 mum and feature sizes to ~0.2 mum are presented.
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01-internacional
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MEDLINE
Idioma:
En
Revista:
Opt Lett
Ano de publicação:
1999
Tipo de documento:
Article