Computer processing of electron microscope cross sections of multilayer mirrors.
Appl Opt
; 36(25): 6491-7, 1997 Sep 01.
Article
em En
| MEDLINE
| ID: mdl-18259509
ABSTRACT
A method is developed for determining interface profiles of extreme ultraviolet- (EUV-) layered synthetic microstructures (LSM's). It is based on computer processing digitized LSM electron micrographs. This study was carried out on a tungsten/carbon multilayer. Interfacial roughness has been characterized by means of two statistical parameters, i.e., the root mean square (rms) roughness height and the autocorrelation length varsigma. Additionally, knowledge of interface profiles should enable one to study more accurately the structural behavior of the stack, from the substrate to the top, and, in turn, help one better understand its EUV optical properties.
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01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Appl Opt
Ano de publicação:
1997
Tipo de documento:
Article