In situ lift-out: steps to improve yield and a comparison with other FIB TEM sample preparation techniques.
Micron
; 39(8): 1325-30, 2008 Dec.
Article
em En
| MEDLINE
| ID: mdl-18555690
ABSTRACT
Steps to improve the success yield of the in situ lift-out technique are presented. These include tapping the plinth of the system and monitoring the grounding current to check the lift-out needle is fixed to the material being removed. In addition, the relative success yields and the time to prepare a TEM lamella for the three main FIB methods are discussed and compared.
Texto completo:
1
Coleções:
01-internacional
Base de dados:
MEDLINE
Assunto principal:
Microscopia Eletrônica de Transmissão
Idioma:
En
Revista:
Micron
Assunto da revista:
DIAGNOSTICO POR IMAGEM
Ano de publicação:
2008
Tipo de documento:
Article
País de afiliação:
Reino Unido