SU-8 polymer enclosed microchannels with interconnect and nanohole arrays as an optical detection device for biospecies.

ABSTRACT

We present for the first time the integration of nanohole arrays for surface plasmon resonance (SPR) sensing together with SU-8 polymer microfluidic channels containing special packaging structures for chip-to-chip and world-to-chip interconnect. Primary steps towards an optical biospecies detection device are presented including observing the effect of period on transmission peak location, examining new materials for the enclosed microchannels, and demonstrating nanohole array SPR transmission data through water contained in the microchannels. Additionally, the enclosed microchannels are integrated with interconnect structures that facilitate interfacing with macro-scale test equipment and microfluidic components and systems such as lab-on-a-chip. Results demonstrate the potential of the polymer microchannels with integrated nanohole arrays and interconnect as a packaged optical SPR detection device.