Figuring technology of nonaxisymmetric errors with a spiral path.

Figuring technology of nonaxisymmetric errors using a spiral path is presented. Based on an approximation of a removal function, a finite-field nonlinear model is deduced from the computer-controlled optics shaping principle. We then present a modified Richardson-Lucy iterative algorithm to deconvolute the dwell time. With a velocity realization method for dwell time on a spiral path, the figuring technology comes into being. Simulations are made to validate these algorithms. Theoretical and simulation studies demonstrate that the figuring technology is a novel method for inexpensive fabrication of precision mirrors.