Micro-XANES mapping of buried interfaces: pushing microbeam techniques to the nanoscale.

A specific preparation procedure makes possible to obtain in one shot structural and compositional characterization of a buried interface at the nanometre scale using a micrometre scale probe. A specific example based on dispersive mu-XAS, micro X-ray absorption spectroscopy, shows that nearly-atomic scale changes in local structure, composition, as well as local disorder are faithfully detected. The approach could in principle be applied to any probe with a micrometric resolution.