Gas sensing property of perovskite SrTi(1-x)Fe(x)O3_delta fabricated by thick film planar technology.

Planar sensor of SrTi(1-x)Fe(x)O3-delta, x = 0.4 and 0.6, with perovskite structure was fabricated on alumina substrate using thick film technology. Electrical resistance was measured as a function of thermal treatment conditions, atmosphere, time and temperature. Sensing property was also measured as a function of temperature and the gases of O2, CH4, CO, CO2, NO and NO2. The resistance of SrTi(1-x)Fe(x)O3-delta is lower than those of SrTiO3 or SrFeO3. TCR (temperature coefficient of resistance) of zero over 550 degrees C was measured for the composition of SrTi(1-x)Fe(x)O3-delta after thermal treatment at 1100 degrees C in air atmosphere only. The perovskite SrTi(1-x)Fe(x)O3-delta didn't show any response to CH4, CO, CO2, NO and NO2, but an excellent response and recovery characteristics with oxygen concentration.