Reliable optical characterization of e-beam evaporated TiO2 films deposited at different substrate temperatures.
Appl Opt
; 53(4): A8-15, 2014 Feb 01.
Article
em En
| MEDLINE
| ID: mdl-24514253
ABSTRACT
We studied e-beam evaporated TiO2 films deposited at two different substrate temperatures between 120°C and 300°C. We reliably characterized the film samples on the basis of in situ and ex situ measurements. We carried out annealing on the samples and studied the induced changes in the properties of the films. The results can be useful for further laser-induced damage threshold investigations.
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Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Appl Opt
Ano de publicação:
2014
Tipo de documento:
Article