Translation-reduced ion beam figuring.

A translation-reduced ion beam figuring (TRIBF) technique for five-axis ion beam figuring (IBF) plants is proposed to process large size components which cannot be processed in the traditional way. This novel technique enhances the capability of five-axis IBF plants by taking advantage of their rotation axes. The IBF kinematic model is described and the TRIBF processing technique is established by solving the motion parameters. Verification experiments are conducted on a 150 mm diameter planar mirror. This mirror was processed by TRIBF technique with only a 100 mm translation stage. The surface error was reduced from initial 10.7 nm rms to 1.3 nm rms within 97 minute processing time. The result indicates that the TRIBF processing technique is feasible and effective.