Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation.
Sensors (Basel)
; 16(5)2016 05 13.
Article
em En
| MEDLINE
| ID: mdl-27187404
ABSTRACT
A new way of measuring planar position for micrometric and sub-micrometric applications is presented with a mono sensing electrode and hybrid-frequency excitation. The sensing theory and operation principle are described and summarized, and a printed circuit board (PCB) sensor prototype is built and tested. It is shown by the experimental results that a very simple structure and geometric relationship are achieved. Meanwhile, displacement sensitivity on an order of 1.50 mV per micron and measurement repeatability better than 0.002 mm are easily fulfilled for a square zone of 256 mm², making it a valuable alternative measurement device candidate for flexible and low-cost planar position detection.
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1
Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Sensors (Basel)
Ano de publicação:
2016
Tipo de documento:
Article
País de afiliação:
China