Accurate and Precise Determination of Mechanical Properties of Silicon Nitride Beam Nanoelectromechanical Devices.

Kim, Hakseong; Shin, Dong Hoon; McAllister, Kirstie; Seo, Miri; Lee, Sangik; Kang, Il-Suk; Park, Bae Ho; Campbell, Eleanor E B; Lee, Sang Wook

Kim, Hakseong; Shin, Dong Hoon; McAllister, Kirstie; Seo, Miri; Lee, Sangik; Kang, Il-Suk; Park, Bae Ho; Campbell, Eleanor E B; Lee, Sang Wook.

Afiliação

Kim H; Korea Research Institute of Standards and Science (KRISS) , Daejeon 34113, Korea.
Shin DH; Department of Physics, Ewha Womans University , Seoul 03760, Korea.
McAllister K; Department of Physics, Ewha Womans University , Seoul 03760, Korea.
Seo M; Department of Physics, Ewha Womans University , Seoul 03760, Korea.
Lee S; Division of Quantum Phases & Devices, School of Physics, Konkuk University , Seoul 05029, Korea.
Kang IS; National Nanofab Center, Korea Advanced Institute of Science and Technology , Daejeon 34141, Korea.
Park BH; Division of Quantum Phases & Devices, School of Physics, Konkuk University , Seoul 05029, Korea.
Campbell EE; Division of Quantum Phases & Devices, School of Physics, Konkuk University , Seoul 05029, Korea.
Lee SW; EaStCHEM, School of Chemistry, Edinburgh University , David Brewster Road, Edinburgh EH9 3FJ, U.K.

ACS Appl Mater Interfaces ; 9(8): 7282-7287, 2017 Mar 01.

Article em En | MEDLINE | ID: mdl-28156098

Palavras-chave

biomolecular sensors; gas detectors; mass sensors; nanoelectromechanical systems; resonators

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Assunto da revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Ano de publicação: 2017 Tipo de documento: Article

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