Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure.
Materials (Basel)
; 6(8): 3160-3170, 2013 Jul 26.
Article
em En
| MEDLINE
| ID: mdl-28811428
ABSTRACT
Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission imaging in scanning electron microscopy-S(T)EM. The characterization is performed directly on the microsystem, without any post-synthesis processing required. The results show an effect of temperature on the structure of CNTs high temperature favors thin and regular structures, whereas low temperature favors "bamboo-like" structures.
Texto completo:
1
Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Materials (Basel)
Ano de publicação:
2013
Tipo de documento:
Article
País de afiliação:
Noruega
País de publicação:
CH
/
SUIZA
/
SUÍÇA
/
SWITZERLAND