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MEMS-Based Ionization Gas Sensors for VOCs with Array of Nanostructured Silicon Needles.
Wang, Bo; Dong, Xu-Sheng; Wang, Zi; Wang, Yan-Fang; Hou, Zhong-Yu.
Afiliação
  • Wang B; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Department of Micro/Nano Electronics, School of Electronic information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240,
  • Dong XS; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Department of Micro/Nano Electronics, School of Electronic information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240,
  • Wang Z; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Department of Micro/Nano Electronics, School of Electronic information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240,
  • Wang YF; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Department of Micro/Nano Electronics, School of Electronic information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240,
  • Hou ZY; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Department of Micro/Nano Electronics, School of Electronic information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240,
ACS Sens ; 5(4): 994-1001, 2020 04 24.
Article em En | MEDLINE | ID: mdl-32174111
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Silício / Nanoestruturas / Compostos Orgânicos Voláteis / Sistemas Microeletromecânicos / Gases Idioma: En Revista: ACS Sens Ano de publicação: 2020 Tipo de documento: Article País de publicação: Estados Unidos
Texto completo
Adicionar na Minha BVS
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Silício / Nanoestruturas / Compostos Orgânicos Voláteis / Sistemas Microeletromecânicos / Gases Idioma: En Revista: ACS Sens Ano de publicação: 2020 Tipo de documento: Article País de publicação: Estados Unidos