A new micro/nano-touch-trigger probe using an optoelectronic sensor with a wedge prism.

ABSTRACT

In this paper, we propose a new touch-trigger probe with high precision and a large permissible measurement range. A wedge prism was used in the sensing unit to achieve 3D detection using only one optoelectronic sensor. The measurement range was expanded from ±8 µm to ±14 µm through the new optical structure. The probe has uniform stiffness and uniform sensitivity. Some experiments were performed to investigate the performance of the probe. It was found that the probe has a resolution of 10 nm and a repeatability of less than 9.1 nm. The applicability of the probe was also verified.