A Miniature Wireless Silicon-on-Insulator Image Sensor for Brain Fluorescence Imaging.

ABSTRACT

Optical recording of genetically encoded calcium indicator (GECI) allows neuroscientists to study the activity of genetically labeled neuron populations, but our current tools lack the resolution, stability and are often too invasive. Here we present the design concepts, prototypes, and preliminary measurement results of a super-miniaturized wireless image sensor built using a 32nm Silicon-on-Insulator process. SOI process is optimal for wireless applications, and we can further thin the substrate to reduce overall device thickness to ~25µm and operate the pixels using back-side illumination. The proposed device is 300µm × 300µm. Our prototype is built on a 3 × 3mm die.