Compliant Nano-Pliers as a Biomedical Tool at the Nanoscale: Design, Simulation and Fabrication.
Micromachines (Basel)
; 11(12)2020 Dec 08.
Article
em En
| MEDLINE
| ID: mdl-33302376
ABSTRACT
This paper presents the development of a multi-hinge, multi-DoF (Degrees of Freedom) nanogripper actuated by means of rotary comb drives and equipped with CSFH (Conjugate Surface Flexure Hinges), with the goal of performing complex in-plane movements at the nanoscale. The design approach, the simulation and a specifically conceived single-mask fabrication process are described in detail and the achieved results are illustrated by SEM images. The first prototype presents a total overall area of (550 × 550) µm2, an active clamping area of (2 × 4) µm2, 600 nm-wide circular curved beams as flexible hinges for its motion and an aspect ratio of about 2.5. These features allow the proposed system to grasp objects a few hundred nanometers in size.
Texto completo:
1
Coleções:
01-internacional
Base de dados:
MEDLINE
Tipo de estudo:
Clinical_trials
Idioma:
En
Revista:
Micromachines (Basel)
Ano de publicação:
2020
Tipo de documento:
Article
País de afiliação:
Itália