A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation.

ABSTRACT

This work pertains to the design of a cantilever-based piezoelectric MEMS device that is capable of generating arbitrary paths of its tip. The conceived device consists of a pair of rigidly coupled piezoelectric bimorph cantilevers, and a theoretical model is developed for the analytical evaluation of the proper voltage distribution to be supplied to the inner and outer electrodes of each piezoelectric actuator, in order to drive the tip along any desired trajectory. Such a device could be appealing in some microsurgical operations, i.e., the unclogging of arteries, endoluminal treatment of obstructive lesions, but also as a 2D micropositioning stage, etc. Theoretical predictions of voltage versus time that allow several pathways such as circles, ellipses, spirals, etc., to be accomplished have been verified with multiphysics FEM simulations and the numerical outcomes seem to corroborate the proposed model.