Identification and classification of particle contaminants on photomasks based on individual-particle Raman scattering spectra and SEM images.

Li, Dongxian; Zhang, Tao; Yue, Weisheng; Gao, Ping; Luo, Yunfei; Wang, Changtao; Luo, Xiangang

Li, Dongxian; Zhang, Tao; Yue, Weisheng; Gao, Ping; Luo, Yunfei; Wang, Changtao; Luo, Xiangang.

Afiliação

Li D; State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences P.O. Box 350 Chengdu 610209 China lxg@ioe.ac.cn.
Zhang T; School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China P.O. Box 350 Chengdu 610209 China.
Yue W; School of Optoelectronics, University of Chinese Academy of Sciences Beijing 100049 China.
Gao P; State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences P.O. Box 350 Chengdu 610209 China lxg@ioe.ac.cn.
Luo Y; State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences P.O. Box 350 Chengdu 610209 China lxg@ioe.ac.cn.
Wang C; State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences P.O. Box 350 Chengdu 610209 China lxg@ioe.ac.cn.
Luo X; State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences P.O. Box 350 Chengdu 610209 China lxg@ioe.ac.cn.

RSC Adv ; 12(51): 33349-33357, 2022 Nov 15.

Article em En | MEDLINE | ID: mdl-36425188

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies Idioma: En Revista: RSC Adv Ano de publicação: 2022 Tipo de documento: Article País de publicação: Reino Unido

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