Miniaturised gap sensor using fibre optic Fabry-Pérot interferometry for structural health monitoring.
Opt Express
; 30(24): 42923-42932, 2022 Nov 21.
Article
em En
| MEDLINE
| ID: mdl-36523002
A miniaturised structural health monitoring device has been developed capable of measuring the absolute distance between close parallel surfaces using Fabry-Pérot interferometry with nm-scale sensitivity. This is achieved by fabricating turning mirrors on two opposite cores of a multi-core fibre to produce a probe with dimensions limited only be the fibre diameter. Two fabrication processes have been investigated: Focused ion beam milling, which has resulted in a sensor measurement accuracy, sensitivity and range of ±0.056 µm, ±0.006 µm and â¼16000 µm respectively; and ultrafast laser assisted etching of the cleaved fibre end, where a sensor measurement accuracy, sensitivity and range of ±0.065 µm, ±0.006 µm and â¼7500 µm have been demonstrated.
Texto completo:
1
Coleções:
01-internacional
Base de dados:
MEDLINE
Assunto principal:
Tecnologia de Fibra Óptica
/
Interferometria
Idioma:
En
Revista:
Opt Express
Assunto da revista:
OFTALMOLOGIA
Ano de publicação:
2022
Tipo de documento:
Article
País de publicação:
Estados Unidos