What MEMS Research and Development Can Learn from a Production Environment.

Niekiel, Malte Florian; Meyer, Jana Marie; Lewitz, Hanna; Kittmann, Anne; Nowak, Marc Alexander; Lofink, Fabian; Meyners, Dirk; Zollondz, Jens-Hendrik

Niekiel, Malte Florian; Meyer, Jana Marie; Lewitz, Hanna; Kittmann, Anne; Nowak, Marc Alexander; Lofink, Fabian; Meyners, Dirk; Zollondz, Jens-Hendrik.

Afiliação

Niekiel MF; Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstr. 1, 25524 Itzehoe, Germany.
Meyer JM; Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstr. 1, 25524 Itzehoe, Germany.
Lewitz H; Institute for Material Science, Kiel University, Kaiserstr. 2, 24143 Kiel, Germany.
Kittmann A; Institute for Material Science, Kiel University, Kaiserstr. 2, 24143 Kiel, Germany.
Nowak MA; Institute for Material Science, Kiel University, Kaiserstr. 2, 24143 Kiel, Germany.
Lofink F; Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstr. 1, 25524 Itzehoe, Germany.
Meyners D; Institute for Material Science, Kiel University, Kaiserstr. 2, 24143 Kiel, Germany.
Zollondz JH; Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstr. 1, 25524 Itzehoe, Germany.

Sensors (Basel) ; 23(12)2023 Jun 13.

Article em En | MEDLINE | ID: mdl-37420715

Assuntos

Sistemas Microeletromecânicos; Pesquisa

Palavras-chave

biomagnetic sensing; device design; failure mode and effects analysis; magnetoelectric sensor; microelectromechanical system; process flow; process integration; semiconductor manufacturing

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Sistemas Microeletromecânicos Idioma: En Revista: Sensors (Basel) Ano de publicação: 2023 Tipo de documento: Article País de afiliação: Alemanha País de publicação: Suíça

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