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Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films.
Pleshakov, Georgii A; Kalinin, Ivan A; Ivanov, Alexey V; Roslyakov, Ilya V; Yaminsky, Igor V; Napolskii, Kirill S.
Afiliação
  • Pleshakov GA; Department of Materials Science, Lomonosov Moscow State University, 1, Bld. 73 Leninskie Gory, Moscow 119991, Russia.
  • Kalinin IA; Department of Materials Science, Lomonosov Moscow State University, 1, Bld. 73 Leninskie Gory, Moscow 119991, Russia.
  • Ivanov AV; Department of Chemistry, Lomonosov Moscow State University, 1, Bld. 3 Leninskie Gory, Moscow 119991, Russia.
  • Roslyakov IV; Department of Materials Science, Lomonosov Moscow State University, 1, Bld. 73 Leninskie Gory, Moscow 119991, Russia.
  • Yaminsky IV; Skoltech Center for Energy Science and Technology, Skolkovo Institute of Science and Technology, 3 Nobel Street, Moscow 121205, Russia.
  • Napolskii KS; Department of Materials Science, Lomonosov Moscow State University, 1, Bld. 73 Leninskie Gory, Moscow 119991, Russia.
Micromachines (Basel) ; 14(11)2023 Oct 28.
Article em En | MEDLINE | ID: mdl-38004860
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2023 Tipo de documento: Article País de afiliação: Federação Russa
Texto completo
Adicionar na Minha BVS
Imprimir
XML
PubMed Links
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2023 Tipo de documento: Article País de afiliação: Federação Russa