Fabrication of Implantable Microelectrode Array using Cyclic Olefin Copolymer and SU-8 via Photocrosslinking Lamination.
Annu Int Conf IEEE Eng Med Biol Soc
; 2023: 1-4, 2023 07.
Article
em En
| MEDLINE
| ID: mdl-38083392
ABSTRACT
In this work, a fabrication process for implantable electrodes using a Cyclic Olefin Copolymer (COC) substrate and a SU-8 passivation layer was presented. COC and SU-8 were shown to be suitable for implantable neural electrodes due to their biocompatibility, chemical resistance, and thermal stability. The electrodes were successfully patterned on the COC film, and the SU-8 passivation layer was coated while maintaining site-opened via photolithography. The photocrosslinking lamination of the substrate and passivation layer was used to produce electrodes with fine line widths of 20um without applying heat.
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1
Coleções:
01-internacional
Base de dados:
MEDLINE
Assunto principal:
Cicloparafinas
Idioma:
En
Revista:
Annu Int Conf IEEE Eng Med Biol Soc
Ano de publicação:
2023
Tipo de documento:
Article