High precision polishing of aluminum alloy mirrors through a combination of magnetorheological finishing and chemical mechanical polishing.

ABSTRACT

After the aluminum alloy mirror machined by single point diamond turning (SPDT), the residual tool marks and surface accuracy of the aluminum alloy mirror cannot meet the requirements of visible or ultraviolet light system. In this study, a processing method combining magnetorheological finishing (MRF) and chemical mechanical polishing (CMP) is proposed to realize the polishing of aluminum alloy mirrors with high efficiency, high precision and high-quality. Firstly, the properties and composition of passivation layer after MRF were analyzed and the polishing performance of acidic, neutral and alkaline alumina polishing fluid on passivation layer were investigated based on the computer numerical control (CNC) polishing equipment. Based on the experimental results, a new acidic nano-silica polishing fluid which is suitable for the efficient and high-quality removal of passivation layers on aluminum alloy surfaces was developed. Finally, a combined approach of MRF-CMP was used to the directly polishing of a rapidly solidified aluminum mirror (RSA-6061) with a diameter of 100 mm after SPDT. With two iterative of MRF-CMP polishing in 220 minutes, the surface accuracy of the aluminum alloy mirror was improved from 0.1λ (λ=632.8 nm) to 0.024λ, and the surface roughness (Ra) decreased from 3.6 nm to 1.38 nm. The experiment results manifest that high precision, and high-quality aluminum alloy mirror can be achieved by MRF-CMP method with the new developed acid nano-silica polishing fluid and suitable MR polishing fluid. The research results will provide a new strategy for ultra-precision direct polishing of aluminum alloy mirrors and will also give the important technical support for the extensive use of aluminum alloy mirror in visible light and ultraviolet optical systems.