Multimode experimental band dynamics of resonant nanophotonic lattices.

Subwavelength resonant lattices provide a host of interesting spectral expressions on broadside illumination. The resonance mechanism is based on generation of lateral Bloch modes phase matched to evanescent diffraction orders. The leaky mode structure and mode count determine the spectra and the number of resonance states. Here, we study band flips and bound-state transitions in guided-mode resonant structures supporting multiple resonant modes. We present theoretical simulations and experimental results for a subwavelength silicon-nitride lattice integrated with a liquid film with adjustable boundary. The relatively thick liquid waveguiding region supports additional modes such that the first four transverse-electric (TE) leaky modes are present and generate observable resonance signatures. By varying the duty cycle of the basic lattice in experiment, the 4 bands undergo band transitions and band closures as quantified herein. The experimental results taken in the 1400-1600 nm spectral region agree reasonably well with numerical analysis.

Robust dynamic spectroscopic imaging ellipsometer based on a monolithic polarizing Linnik interferometer.

We describe a robust dynamic spectroscopic imaging ellipsometer (DSIE) based on a monolithic Linnik-type polarizing interferometer. The Linnik-type monolithic scheme combined with an additional compensation channel solves the long-term stability problem of previous single-channel DSIE. The importance of a global mapping phase error compensation method is also addressed for accurate 3-D cubic spectroscopic ellipsometric mapping in large-scale applications. To evaluate the effectiveness of the proposed compensation method for enhancing system robustness and reliability, a whole thin film wafer mapping is conducted in a general environment where various external disturbances affect the system.

Experimental band flip and band closure in guided-mode resonant optical lattices.

We demonstrate band flip in one-dimensional dielectric photonic lattices presenting numerical and experimental results. In periodic optical lattices supporting leaky Bloch modes, there exists a second stop band where one band edge experiences radiation loss resulting in guided-mode resonance (GMR), while the other band edge becomes a nonleaky bound state in the continuum (BIC). To illustrate the band flip, band structures for two different lattices are provided by calculating zero-order reflectance with respect to wavelength and incident angle. We then provide three photonic lattices, each with a different fill factor, consisting of photoresist gratings on Si3N4 sublayers with glass substrates. The designs are fabricated using laser interferometric lithography. The lattice parameters are characterized and verified with an atomic force microscope. The band transition under fill-factor variation is accomplished experimentally. The measured data are compared to simulation results and show good agreement.

Dynamic spectroscopic imaging ellipsometry.

A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 × 50 µm2 in an hour.

Resonant reflection by microsphere arrays with AR-quenched Mie scattering.

Periodic guided-mode resonance structures which provide perfect reflection across sizeable spectral bandwidths have been known for decades and are now often referred to as metasurfaces and metamaterials. Although the underlying physics for these devices is explained by evanescent-wave excitation of leaky Bloch modes, a growing body of literature contends that local particle resonance is causative in perfect reflection. Here, we address differentiation of Mie resonance and guided-mode resonance in mediating resonant reflection by periodic particle assemblies. We treat a classic 2D periodic array consisting of silicon spheres. To disable Mie resonance, we apply an optimal antireflection (AR) coating to the spheres. Reflectance maps for coated and uncoated spheres demonstrate that perfect reflection persists in both cases. It is shown that the Mie scattering efficiency of an AR-coated sphere is greatly diminished. The reflectance properties of AR-coated spherical arrays have not appeared in the literature previously. From this viewpoint, these results illustrate high-efficiency resonance reflection in Mie-resonance-quenched particle arrays and may help dispel misconceptions of the basic operational physics.

Perfectly-reflecting guided-mode-resonant photonic lattices possessing Mie modal memory.

Resonant periodic nanostructures provide perfect reflection across small or large spectral bandwidths depending on the choice of materials and design parameters. This effect has been known for decades, observed theoretically and experimentally via one-dimensional and two-dimensional structures commonly known as resonant gratings, metamaterials, and metasurfaces. The physical cause of this extraordinary phenomenon is guided-mode resonance mediated by lateral Bloch modes excited by evanescent diffraction orders in the subwavelength regime. In recent years, hundreds of papers have declared Fabry-Perot or Mie resonance to be the basis of the perfect reflection possessed by periodic metasurfaces. Treating a simple one-dimensional cylindrical-rod lattice, here we show clearly and unambiguously that Mie resonance does not cause perfect reflection. In fact, the spectral placement of the Bloch-mode-mediated zero-order reflectance is primarily controlled by the lattice period by way of its direct effect on the homogenized effective-medium refractive index of the lattice. In general, perfect reflection appears away from Mie resonance. However, when the lateral leaky-mode field profiles approach the isolated-particle Mie field profiles, the resonance locus tends towards the Mie resonance wavelength. The fact that the lattice fields "remember" the isolated particle fields is referred here as "Mie modal memory." On erasure of the Mie memory by an index-matched sublayer, we show that perfect reflection survives with the resonance locus approaching the homogenized effective-medium waveguide locus. The results presented here will aid in clarifying the physical basis of general resonant photonic lattices.

Silicon-nitride microring resonators for nonlinear optical and biosensing applications.

We discuss the design, fabrication, and characterization of silicon-nitride microring resonators for nonlinear-photonic and biosensing device applications. The first part presents new theoretical and experimental results that overcome highly normal dispersion of silicon-nitride microresonators by adding a dispersive coupler. The latter parts review our work on highly efficient second-order nonlinear interaction in a hybrid silicon-nitride slot waveguide with nonlinear polymer cladding and silicon-nitride microring application as a biosensor for human stress indicator neuropeptide Y at the nanomolar level.

Rapid large-scale fabrication of multipart unit cell metasurfaces.

Periodic diffractive elements known as metasurfaces constitute platform technology whereby exceptional optical properties, not attainable by conventional means, are attained. Generally, with increasing unit-cell complexity, there emerges a wider design space and bolstered functional capability. Advanced devices deploying elaborate unit cells are typically generated by electron-beam patterning which is a tedious, slow process not suitable for large surfaces and quick turnaround. Ameliorating this condition, we present a novel route towards facile fabrication of complex periodic metasurfaces based on sequential exposures by laser interference lithography. Our method is fast, cost-effective, and can be applied to large surface areas. It is enabled by precise control over periodicity and exposure energy. With it we have successfully patterned and fabricated one-dimensional (1D) and two-dimensional (2D) multipart unit cell devices as demonstrated here. Thus, zero-order transmission spectra of an etched four-part 1D grating device are simulated and measured for both transverse-electric (TE) and transverse-magnetic (TM) polarization states of normally incident light. We confirm non-resonant wideband antireflection (∼800 nm) for TM-polarized light and resonance response for TE-polarized light in the near-IR band spanning 1400-2200 nm in a ∼100 mm2 device. Furthermore, it is shown that this method of fabrication can be implemented not only to pattern periodic symmetric/asymmetric designs but also to realize non-periodic metasurfaces. The method will be useful in production of large-area photonic devices in the realm of nanophotonics and microphotonics.

Polarization-differentiated band dynamics of resonant leaky modes at the lattice Γ point.

In the physical description of photonic lattices, leaky-mode resonance and bound states in the continuum are central concepts. Understanding of their existence conditions and dependence on lattice parameters is of fundamental interest. Primary leaky-wave effects are associated with the second stop band at the photonic lattice Γ point. The pertinent band gap is defined by the frequency difference between the leaky-mode band edge and the bound-state edge. This paper address the polarization properties of the band gaps resident in laterally periodic one-dimensional photonic lattices. We show that the band gaps pertinent to TM and TE leaky modes exhibit significantly differentiated evolution as the lattice parameters vary. This is because the TM band gap is governed by a surface effect due to the discontinuity of the dielectric constant at the interfaces of the photonic lattice as well as by a Bragg effect due to the periodic in-plane dielectric constant modulation. We find that when the lattice is thin (thick), the surface (Bragg) effect dominates the Bragg (surface) effect in the formation of the TM band. This leads to complex TM band dynamics with multiple band closures possible under parametric variation. In complete contrast, the TE band gap is governed only by the Bragg effect thus exhibiting simpler band dynamics. This research elucidates the important effect of polarization on resonant leaky-mode band dynamics whose explanation has heretofore not been available.

Cascaded metamaterial polarizers for the visible region.

Polarizers serve many application fields such as imaging, display technology, and telecommunications. Focusing on the visible spectral region, we provide the design and fabrication of compact high-efficiency resonant polarizers in the crystalline silicon-on-quartz material system. We experimentally verify the improved efficiency attained by a cascaded dual-module polarizer assembled with building blocks of elemental subwavelength grating structures. We obtain a measured extinction ratio (ER) of ∼3000 in a 2 mm thick stacked prototype device across a bandwidth of ∼110nm in the 570-680 nm spectral domain. The ridge width of the constituent nanograting is ∼84nm. Computed results show a high ER in spite of the lossy nature of crystalline silicon in the visible region, enabling cascaded metasurfaces while preserving high transmission.

Band dynamics of leaky-mode photonic lattices.

External waves incident on a periodic metamaterial lattice couple to it at frequencies corresponding to the leaky, or second, stop band. The resulting leaky-mode or guided-mode resonance effects are useful in device design and spectral manipulation. Indeed, some of the most important properties of metamaterials are associated with the leaky stopband. Thus motivated, we treat the band dynamics of leaky-mode resonant photonic lattices. In particular, properties of the band gap and conditions for band closure and band flips under multimode conditions are quantified. For a symmetric lattice, the nonleaky band edge hosts a bound state in the continuum whose band transition reverses the modal symmetry of the band edge modes. The leaky edge supports a guided-mode resonant radiative peak that also undergoes band flip upon band closure. We analyze a canonical one-dimensional lattice with exact numerical methods and a semianalytical formulation modified to handle the multimodal case. We show that the band dynamics of the various leaky modes present differ appreciably with, for example, the band associated with the fundamental TE0 and the first higher order TE1 modes closing at differing values of dielectric-constant modulation. We compare the thin-film lattice with an infinite lattice and find an approximate analytical condition for band closure that we verify with rigorous computations.

Essential differences between TE and TM band gaps in periodic films at the first Bragg condition.

In photonic lattices with thin-film geometry, TE modes possess an in-plane electric field component parallel to the film surface, whereas TM modes have a magnetic field component similarly oriented. This study reports the essential properties of, and differences between, TE and TM band gaps induced by laterally periodic thin-film photonic lattices at the first Bragg condition. Because TE and TM guided waves obey different wave equations, TE and TM band gaps exhibit different evolution as the film thickness varies. The first TM band exhibits both band gap closure and band flips wherein the symmetry properties of the band-edge modes are reversed by variation of film thickness. In the first TE band, in contrast, there is neither band gap closure nor band flip. The work provides an insightful semianalytical formulation whose results are verified by rigorous computations.

Metamaterial polarizer providing principally unlimited extinction.

Polarizers are universal components deployed in diverse application fields including imaging, display, microscopy, interferometry, ellipsometry, and instrumentation. Here, we demonstrate design and fabrication of a new class of polarizers that are extremely compact and efficient. Based on an elemental low-loss single-resonant grating, we develop multilayer modules providing ultrahigh extinction ratio polarizers. The elemental polarizer contains a subwavelength periodic pattern of crystalline silicon on a quartz substrate. A stack of two dual-grating modules exhibits a measured extinction ratio (ER) of ∼100,000 in a sparse 2-mm-thick device across a bandwidth of ∼50 nm in the telecommunications spectral region. Theoretical computations indicate that extreme values of extinction are possible. Further development of the basic concepts explored herein may lead to a new class of practical polarizers with excellent attributes.

Refractometric Sensing with Periodic Nano-Indented Arrays: Effect of Structural Dimensions.

Fabrication and sensor application of a simple plasmonic structure is described in this paper. The sensor element consists of nano-patterned gold film brought about from two-dimensional periodic photoresist templates created by holographic laser interference lithography. Reflectance spectroscopy revealed that the sensor exhibits significant refractive index sensitivity. A linear relationship between shifts in plasmonic resonances and changes in the refractive index were demonstrated. The sensor has a bulk sensitivity (SB) of 880 nm/refractive index unit and work under normal incidence conditions. This sensitivity exceeded that of many common types of plasmonic sensors with more intricate structures. A modeled spectral response was used to study the effect of its geometrical dimensions on plasmonic behavior. A qualitative agreement between the experimental spectra and modeled ones was obtained.

Quantification of Neuropeptide Y with Picomolar Sensitivity Enabled by Guided-Mode Resonance Biosensors.

Assessing levels of neuropeptide Y (NPY) in the human body has many medical uses. Accordingly, we report the quantitative detection of NPY biomarkers applying guided-mode resonance (GMR) biosensor methodology. The label-free sensor operates in the near-infrared spectral region exhibiting distinctive resonance signatures. The interaction of NPY with bioselective molecules on the sensor surface causes spectral shifts that directly identify the binding event without additional processing. In the experiments described here, NPY antibodies are attached to the sensor surface to impart specificity during operation. For the low concentrations of NPY of interest, we apply a sandwich NPY assay in which the sensor-linked anti-NPY molecule binds with NPY that subsequently binds with anti-NPY to close the sandwich. The sandwich assay achieves a detection limit of ~0.1 pM NPY. The photonic sensor methodology applied here enables expeditious high-throughput data acquisition with high sensitivity and specificity. The entire bioreaction is recorded as a function of time, in contrast to label-based methods with single-point detection. The convenient methodology and results reported are significant, as the NPY detection range of 0.1-10 pM demonstrated is useful in important medical circumstances.

Fiber-facet-integrated guided-mode resonance filters and sensors: experimental realization.

Guided-mode resonant (GMR) thin films integrated on fiber tips are known to realize compact filters and sensors. However, limited progress in experimental realization has been reported to date. Here we provide a considerable advance in this technology, as we experimentally demonstrate efficient fiber-facet mounted device prototypes. To retain a large aperture for convenient coupling, we design and fabricate silicon nitride-based resonators on the tip of a multimode fiber. We account for light propagation along the multimode fiber with exact numerical methods. This establishes the correct amplitude and phase distribution of the beam incident on the tip-mounted GMR element, thus enabling us to properly predict the resonance response. To fabricate the integrated GMR structures on the tips of fibers, we employ standard microfabrication processes, including holographic interference lithography and reactive-ion etching. The experimental results agree with simulation with an example device achieving high efficiency of ∼77% in transmission. To investigate fiber sensor operation, an etched silicon nitride fiber tip filter is surrounded with solutions of various refractive indices, yielding an approximate sensitivity of 200 nm/RIU.

Experimental demonstration of wideband multimodule serial reflectors.

We demonstrate unpolarized wideband reflectors fashioned with orthogonal serial resonant reflectors. Unpolarized incident light generates internal TM- and TE-polarized reflections that are made to cooperate to extend the bandwidth of the composite spectral reflectance. The experimental results presented show ~42% band extension by a two-grating module. In addition, good angular tolerance is found because the orthogonal arrangement simultaneously supports classical and fully conic mountings at oblique angles. The resulting spectra form contiguous zero-order reflectance across wide spectral/angular regions. Furthermore, using a multimodule device with serial reflectors fabricated with silicon-on-quartz wafers with different device layer thicknesses, extreme band extension is achieved providing ~56% fractional bandwidth with reflectance exceeding 98%. These results imply potential for developing lossless unpolarized mirrors operating in diverse spectral regions of practical interest.

Flat-top narrowband filters enabled by guided-mode resonance in two-level waveguides.

Resonant nanogratings and periodic metasurfaces express diverse spectral and polarization properties on broadside illumination by incident light. Cooperative resonance interactions may yield shaped spectra for particular applications, in contrast to a multilayer dielectric mirror. Here, we provide guided-mode resonance filters with flat-top spectra suitable for wavelength division multiplexing systems. Applying a single one-dimensional grating layer sandwiched by two waveguides, we theoretically achieve high-efficiency flat-top spectra in the near-infrared region. This result is obtained by inducing simultaneous nearly degenerate resonant modes. The resonance separation under this condition controls the width of the flat-top spectrum. This means we can implement spectral widths ranging from a sub-nanometer to several nanometers applying fundamentally the same device architecture.

Properties of wideband resonant reflectors under fully conical light incidence.

Applying numerical modeling coupled with experiments, we investigate the properties of wideband resonant reflectors under fully conical light incidence. We show that the wave vectors pertinent to resonant first-order diffraction under fully conical mounting vary less with incident angle than those associated with reflectors in classical mounting. Therefore, as the evanescent diffracted waves drive the leaky modes responsible for the resonance effects, fully-conical mounting imbues reflectors with larger angular tolerance than their classical counterparts. We quantify the angular-spectral performance of representative resonant wideband reflectors in conic and classic mounts by numerical calculations with improved spectra found for fully conic incidence. Moreover, these predictions are verified experimentally for wideband reflectors fashioned in crystalline and amorphous silicon in distinct spectral regions spanning the 1200-1600-nm and 1600-2400-nm spectral bands. These results will be useful in various applications demanding wideband reflectors that are efficient and materially sparse.

Unpolarized resonance grating reflectors with 44% fractional bandwidth.

There is immense scientific interest in the properties of resonant thin films embroidered with periodic nanoscale features. This device class possesses considerable innovation potential. Accordingly, we report unpolarized broadband reflectors enabled by a serial arrangement of a pair of polarized subwavelength gratings. Optimized with numerical methods, our elemental gratings consist of a partially etched crystalline-silicon film on a quartz substrate. The resulting reflectors exhibit extremely wide spectral reflection bands in one polarization. By arranging two such reflectors sequentially with orthogonal periodicities, there results an unpolarized spectral band that exceeds those of the individual polarized bands. In the experiments reported herein, we achieve zero-order reflectance exceeding 97% under unpolarized light incidence over a 500 nm wide wavelength band. This wideband represents a ∼44% fractional band in the near infrared. Moreover, the resonant unpolarized broadband accommodates an ultra-high reflection band spanning ∼85 nm and exceeding 99.9% in efficiency. The elemental polarization-sensitive reflectors based on one-dimensional (1D) resonant gratings have a simple design and robust performance, and are straightforward to fabricate. Hence, this technology is a promising alternative to traditional multilayer thin-film reflectors, especially at longer wavelengths of light where multilayer deposition may be infeasible or impractical.