Recent advances in deformation-assisted microfluidic cell sorting technologies.

Cell sorting is an essential prerequisite for cell research and has great value in life science and clinical studies. Among the many microfluidic cell sorting technologies, label-free methods based on the size of different cell types have been widely studied. However, the heterogeneity in size for cells of the same type and the inevitable size overlap between different types of cells would result in performance degradation in size-based sorting. To tackle such challenges, deformation-assisted technologies are receiving more attention recently. Cell deformability is an inherent biophysical marker of cells that reflects the changes in their internal structures and physiological states. It provides additional dimensional information for cell sorting besides size. Therefore, in this review, we summarize the recent advances in deformation-assisted microfluidic cell sorting technologies. According to how the deformability is characterized and the form in which the force acts, the technologies can be divided into two categories: (1) the indirect category including transit-time-based and image-based methods, and (2) the direct category including microstructure-based and hydrodynamics-based methods. Finally, the separation performance and the application scenarios of each method, the existing challenges and future outlook are discussed. Deformation-assisted microfluidic cell sorting technologies are expected to realize greater potential in the label-free analysis of cells.

Solvent-controlled synthesis of hydrophilic and hydrophobic carbon dots.

Hydrophilicity and hydrophobicity are of paramount importance in surface chemistry. In this study, a solvent-controlled synthesis of hydrophilic and hydrophobic carbon dots (CDs) was prepared via a solvothermal process using pentafluorobenzyl alcohol as the carbon source in either deionized water or N,N-dimethylformamide (DMF) medium. By simply varying the reaction solvent to control the doping of nitrogen and fluorine elements, the hydrophilicity or hydrophobicity of the CDs could be regulated. Hydrophobic and hydrophilic CDs showed blue and green light under a UV lamp, respectively. Besides, we regulated the volume ratio of water/DMF (1 : 2, 1 : 1 and 2 : 1) in the reaction solvent to prepare amphiphilic CDs and further studied their hydrophilicity and hydrophobicity. Furthermore, the sensitivity of hydrophobic CDs to water was investigated. In water detection, the photoluminescent intensity of the blue peak and green peak showed high linearity within the water content of 4-80% and 10-80%, respectively (limit of detection = 0.08%, v/v, in DMF).

Numerical Study of Particle Separation through Integrated Multi-Stage Surface Acoustic Waves and Modulated Driving Signals.

The manipulation of biomedical particles, such as separating circulating tumor cells from blood, based on standing surface acoustic wave (SSAW) has been widely used due to its advantages of label-free approaches and good biocompatibility. However, most of the existing SSAW-based separation technologies are dedicated to isolate bioparticles in only two different sizes. It is still challenging to fractionate various particles in more than two different sizes with high efficiency and accuracy. In this work, to tackle the problems of low efficiency for multiple cell particle separation, integrated multi-stage SSAW devices with different wavelengths driven by modulated signals were designed and studied. A three-dimensional microfluidic device model was proposed and analyzed using the finite element method (FEM). In addition, the effect of the slanted angle, acoustic pressure, and the resonant frequency of the SAW device on the particle separation were systemically studied. From the theoretical results, the separation efficiency of three different size particles based on the multi-stage SSAW devices reached 99%, which was significantly improved compared with conventional single-stage SSAW devices.

High-Precision Lensless Microscope on a Chip Based on In-Line Holographic Imaging.

The lensless on-chip microscope is an emerging technology in the recent decade that can realize the imaging and analysis of biological samples with a wide field-of-view without huge optical devices and any lenses. Because of its small size, low cost, and being easy to hold and operate, it can be used as an alternative tool for large microscopes in resource-poor or remote areas, which is of great significance for the diagnosis, treatment, and prevention of diseases. To improve the low-resolution characteristics of the existing lensless shadow imaging systems and to meet the high-resolution needs of point-of-care testing, here, we propose a high-precision on-chip microscope based on in-line holographic technology. We demonstrated the ability of the iterative phase recovery algorithm to recover sample information and evaluated it with image quality evaluation algorithms with or without reference. The results showed that the resolution of the holographic image after iterative phase recovery is 1.41 times that of traditional shadow imaging. Moreover, we used machine learning tools to identify and count the mixed samples of mouse ascites tumor cells and micro-particles that were iterative phase recovered. The results showed that the on-chip cell counter had high-precision counting characteristics as compared with manual counting of the microscope reference image. Therefore, the proposed high-precision lensless microscope on a chip based on in-line holographic imaging provides one promising solution for future point-of-care testing (POCT).

Universal Triboelectric Nanogenerator Simulation Based on Dynamic Finite Element Method Model.

The lack of a universal simulation method for triboelectric nanogenerator (TENG) makes the device design and optimization difficult before experiment, which protracts the research and development process and hinders the landing of practical TENG applications. The existing electrostatic induction models for TENGs have limitations in simulating TENGs with complex geometries and their dynamic behaviors under practical movements due to the topology change issues. Here, a dynamic finite element method (FEM) model is proposed. The introduction of air buffer layers and the moving mesh method eliminates the topology change issues during practical movement and allows simulation of dynamic and time-varying behaviors of TENGs with complex 2D/3D geometries. Systematic investigations are carried out to optimize the air buffer thickness and mesh densities, and the optimized results show excellent consistency with the experimental data and results based on other existing methods. It also shows that a 3D disk-type rotating TENG can be simulated using the model, clearly demonstrating the capability and superiority of the dynamic FEM model. Moreover, the dynamic FEM model is used to optimize the shape of the tribo-material, which is used as a preliminary example to demonstrate the possibility of designing a TENG-based sensor.

Mode Analysis of Pt/LGS Surface Acoustic Wave Devices.

Platinum (Pt) gratings on langasite (LGS) substrates are a widely used structures in high temperature surface acoustic wave (SAW) devices. Multiple modes can be excited in Pt/LGS SAW devices owing to the heavy weight of the Pt electrode and leaky waves in the LGS substrate. In this work, we report on a detailed mode analysis of Pt/LGS SAW devices, where three commonly used LGS cuts are considered. A three-dimensional (3D) finite element method (FEM) numerical model was developed, and the simulation and experiment results were compared. The experiment and simulation results showed that there are two modes excited in the Pt/LGS SAW devices with Euler angle (0°, 138.5°, 27°) and (0°, 138.5°, 117°), which are Rayleigh-type SAW and SH-type leaky wave, respectively. Only the Rayleigh-type mode was observed in the Pt/LGS SAW devices with Euler angle (0°, 138.5°, 72°). It was found that the acoustic velocities are dependent on the wavelength, which is attributed to the change of wave penetration depth in interdigital transducers (IDTs) and the velocity dispersion can be modulated by the thickness of the Pt electrode. We also demonstrated that addition of an Al2O3 passivation layer has no effect on the wave modes, but can increase the resonant frequencies. This paper provides a better understanding of the acoustic modes of Pt/LGS SAW devices, as well as useful guidance for device design. It is believed that the Rayleigh-type SAW and SH-type leaky waves are potentially useful for dual-mode sensing applications in harsh environments, to achieve multi-parameter monitoring or temperature-compensation on a single chip.

A Flexible Film Bulk Acoustic Resonator Based on -Phase Polyvinylidene Fluoride Polymer.

This paper reports a novel flexible film bulk acoustic resonator (FBAR) based on -phase polyvinylidene fluoride (PVDF) piezoelectric polymer. The proposed device was simulated and evaluated; then, a low-temperature photolithography process with a double exposure method was developed to pattern the electrodes for the device, which enabled the device to retain the piezoelectric properties of the -phase PVDF film. Results showed that the ß-phase PVDF FBARs had a resonant frequency round 9.212 with a high electromechanical coupling coefficient () of 12.76% ± 0.56%. The device performed well over a wide bending-strain range up to 2400 owing to its excellent flexibility. It showed good stability as a strain sensor with a sensitivity of 80 , and no visible deterioration was observed after cyclic bending tests. The PVDF FBAR also exhibited an exceptionally large temperature coefficient of frequency (TCF) of -4630 , two orders of magnitude larger than those of other FBARs based on common inorganic piezoelectric materials, extraordinarily high sensitivity for temperature sensing. All results showed that -phase PVDF FBARs have the potential to expand the application scope for future flexible electronics.

Triboelectric Nanogenerator-Based Self-Powered Resonant Sensor for Non-Destructive Defect Detection.

A triboelectric nanogenerator-based self-powered resonant sensor is proposed and investigated. By integrating an inductor and a microswitch with a triboelectric nanogenerator, a new type triboelectric nanogenerator is obtained, the pulse voltage output is converted to an oscillating signal with a very stable modulated resonant frequency, immune to the cross disturbance of contact-related variation (force, frequency, distance) and environmental variation, such as humidity and temperature. This is utilized for non-destructive defect detection. When the coil inductor scans the surface of a specimen with defects, varying resonant frequencies are obtained for different types of defects, showing excellent consistency between the experimental and simulated results. The results demonstrate the potential of the self-powered TENG-based resonant sensor to be a highly stable and sensitive magnetic sensor for the non-destructive defect detection applications.

High Electromechanical Coupling Coefficient of Longitudinally Excited Shear Wave Resonator Based on Optimized Bragg Structure.

In this work, a longitudinally excited shear-wave resonator (YBAR) based on single-crystalline lithium tantalate (LiTaO3, LT) thin film is proposed. The YBAR has a 200 nm X-cut thin film and molybdenum electrode. A high effective electromechanical coupling coefficient (k2eff) of up to 19% for the suspension-type structure was obtained. Furthermore, a Bragg reflector (SiO2/Pt) with optimized layer thickness ratio was employed to improve the performance of the YBAR. Compared to the acoustic wave resonators with the conventional quarter-wave (λ/4) Bragg reflector, the proposed YBAR with an optimized Bragg reflector can reflect both the longitudinal and shear waves efficiently, and resonators with spurious-free response and high quality (Q) value were achieved. This work provides a potential solution to enabling high coupling micro-acoustic resonators with high Q factor in the 5G/6G communication system.

Analytical and experimental study of a valveless piezoelectric micropump with high flowrate and pressure load.

Miniaturized gas pumps based on electromagnetic effect have been intensively studied and widely applied in industries. However, the electromagnetic effect-based gas pumps normally have large sizes, high levels of noises and high power consumption, thus they are not suitable for wearable/portable applications. Herein, we propose a high-flowrate and high-pressure load valveless piezoelectric micropump with dimensions of 16 mm*16 mm*5 mm. The working frequency, vibration mode and displacement of the piezoelectric actuator, the velocity of gas flow, and the volume flowrate of the micropump are analyzed using the finite element analysis method. The maximum vibration amplitude of the piezoelectric actuator reaches ~29.4 µm. The output gas flowrate of the pump is approximately 135 mL/min, and the maximum output pressure exceeds 40 kPa. Then, a prototype of the piezoelectric micropump is fabricated. Results show that performance of the micropump is highly consistent with the numerical analysis with a high flowrate and pressure load, demonstrated its great potential for wearable/portable applications, especially for blood pressure monitoring.

Machine Learning Assisted Wearable Wireless Device for Sleep Apnea Syndrome Diagnosis.

Sleep apnea syndrome (SAS) is a common but underdiagnosed health problem related to impaired quality of life and increased cardiovascular risk. In order to solve the problem of complicated and expensive operation procedures for clinical diagnosis of sleep apnea, here we propose a small and low-cost wearable apnea diagnostic system. The system uses a photoplethysmography (PPG) optical sensor to collect human pulse wave signals and blood oxygen saturation synchronously. Then multiscale entropy and random forest algorithms are used to process the PPG signal for analysis and diagnosis of sleep apnea. The SAS determination is based on the comprehensive diagnosis of the PPG signal and blood oxygen saturation signal, and the blood oxygen is used to exclude the error induced by non-pathological factors. The performance of the system is compared with the Compumedics Grael PSG (Polysomnography) sleep monitoring system. This simple diagnostic system provides a feasible technical solution for portable and low-cost screening and diagnosis of SAS patients with a high accuracy of over 85%.

CVD growth of large-area monolayer WS2 film on sapphire through tuning substrate environment and its application for high-sensitive strain sensor.

Large-area, continuous monolayer WS2 exhibits great potential for future micro-nanodevice applications due to its special electrical properties and mechanical flexibility. In this work, the front opening quartz boat is used to increase the amount of sulfur (S) vapor under the sapphire substrate, which is critical for achieving large-area films during the chemical vapor deposition processes. COMSOL simulations reveal that the front opening quartz boat will significantly introduce gas distribute under the sapphire substrate. Moreover, the gas velocity and height of substrate away from the tube bottom will also affect the substrate temperature. By carefully optimizing the gas velocity, temperature, and height of substrate away from the tube bottom, a large-scale continues monolayered WS2 film was achieved. Field-effect transistor based on the as-grown monolayer WS2 showed a mobility of 3.76 cm2V-1 s-1 and ON/OFF ratio of 106. In addition, a flexible WS2/PEN strain sensor with a gauge factor of 306 was fabricated, showing great potential for applications in wearable biosensors, health monitoring, and human-computer interaction.

The 3.4 GHz BAW RF Filter Based on Single Crystal AlN Resonator for 5G Application.

To meet the stringent requirements of 5G communication, we proposed a high-performance bulk acoustic wave (BAW) filter based on single crystal AlN piezoelectric films on a SiC substrate. The fabrication of the BAW filter is compatible with the GaN high electron mobility transistor (HEMT) process, enabling the implementation of the integration of the BAW device and high-performance monolithic microwave integrated circuit (MMIC). The single crystal AlN piezoelectric film with 650-nm thickness was epitaxially grown on the SiC substrate by Metal Organic Chemical Vapor Deposition (MOCVD). After wafer bonding and substrate removal, the single crystal AlN film with electrode layers was transferred to another SiC wafer to form an air gap type BAW. Testing results showed that the fabricated resonators have a maximum Q-factor up to 837 at 3.3 GHz resonant frequency and electromechanical coupling coefficient up to 7.2%. Ladder-type filters were developed to verify the capabilities of the BAW and process, which has a center frequency of 3.38 GHz with 160 MHz 3 dB bandwidth. The filter achieved a minimum 1.5 dB insertion loss and more than 31 dB out-of-band rejection. The high performance of the filters is attributed to the high crystallinity and low defects of epitaxial single crystal AlN films.

Microfluidic Particle Separation and Detection System Based on Standing Surface Acoustic Wave and Lensless Imaging.

OBJECTIVE: Separation and detection of micro-particles or cells from bio-samples by point-of-care (POC) systems are critical for biomedical and healthcare diagnostic applications. Among various microfluidic separation techniques, acoustophoresis-based technique has the advantages of label-free and good biocompatibility. However, most of the existing separation techniques are bulky and require additional equipment for analysis. METHODS: We proposed a platform, which integrates an acoustophoresis-based separation device and a lensless imaging sensor into a compact standalone system to tackle this challenge. Standing Surface Acoustic Wave (SSAW) is utilized for label-free particle separation, while lensless imaging is employed for seamless particle detection and counting using self-developed dual-threshold motion detection algorithms. In particular, we specially optimized the design of microfluidic channel and interdigital transducers (IDTs) for higher performance bioparticle separation, designed a heat dissipation system for the suppression of fluid temperature, and proposed a novel frequency-temperature-curve based method to determine the appropriate signal driving frequency for IDTs. RESULTS: At 2 µL/min flow rate, separation efficiency of 93.52% and purity of 94.29% for 15 µm microbead were achieved in mixed 5µm and 15µm microbead solution at a 25 dBm RF driving power, and similar results for mixed 10 µm and 15 µm microbead solution. CONCLUSIONS: The results showed that the integrated platform has an excellent capability to seamlessly separate, distinguish, and count microbeads of different sizes. SIGNIFICANCE: Such a platform and the design methodologies offer a promising POC solution for label-free cell separation and detection in biomedical diagnostics.

Numerical Investigation of Phononic Crystal Based Film Bulk Acoustic Wave Resonators.

Film bulk acoustic resonator (FBAR)-based filters have attracted great attention because they can be used to build high-performance RF filters with low cost and small device size. Generally, FBARs employ the air cavity and Bragg mirror to confine the acoustic energy within the piezoelectric layer, so as to achieve high quality factors and low insertion loss. Here, two-dimensional (2D) phononic crystals (PhCs) are proposed to be the acoustic energy reflection layer for an FBAR (PhC-FBAR). Four kinds of PhC structures are investigated, and their bandgap diagrams and acoustic wave reflection coefficients are analyzed using the finite element method (FEM). Then, the PhCs are used as the acoustic wave reflectors at the bottom of the piezoelectric stack, with high reflectivity for elastic waves in the specific frequency range. The results show that the specific PhC possesses a wide bandgap, which enables the PhC-FBAR to work at a broad frequency range. Furthermore, the impedance spectra of PhC-FBARs are very smooth with few spurious modes, and the quality factors are close to those of traditional FBARs with air cavities, showing the application potential of the PhC-FBAR filters with wide bandwidth and high power capability.

Conjunction of triboelectric nanogenerator with induction coils as wireless power sources and self-powered wireless sensors.

Here we demonstrate a magnetic resonance coupling based wireless triboelectric nanogenerator (TENG) and fully self-powered wireless sensors. By integrating a microswitch and an inductor with the TENG, the pulsed voltage output is converted into a sinusoidal voltage signal with a fixed frequency. This can be transmitted wirelessly from the transmit coil to the resonant-coupled receiver coil with an efficiency of 73% for a 5 cm distance between the two coils (10 cm diameter). Analytic models of the oscillating and coupled voltage signals for the wireless energy transfer are developed, showing excellent agreement with the experimental results. A TENG of 40 × 50 mm2 can wirelessly light up 70 LEDs or charge up a 15 µF capacitor to 12.5 V in ~90 s. The system is further utilized for two types of fully self-powered wireless chipless sensors with no microelectronic components. The technologies demonstrate an innovative strategy for a wireless 'green' power source and sensing.

A Portable Triboelectric Nanogenerator for Real-Time Respiration Monitoring.

As a reliable indicator of human physiological health, respiratory rate has been utilized in more and more cases for prediction and diagnosis of potential respiratory diseases and the respiratory dysfunction caused by cystic fibrosis. However, compared with smart mobile electronics, traditional clinical respiration monitoring systems is not convenient to work as a household wearable device for real-time respiration monitoring in daily life due to its cumbersome structure, complex operability, and reliance on external power sources. Thus, we propose a wearable wireless respiration sensor based on lateral sliding mode triboelectric nanogenerator (TENG) to monitor respiratory rates by sensing the variation of the abdominal circumference. In this paper, we validate the possibility of the device as a respiration monitoring sensor via an established theoretical model and investigate the output performance of the sensor via a series of mechanical tests. Furtherly, the applications of the respiration sensor in different individuals, different breathing rhythms, different active states, and wireless transmission have been verified by a lot of volunteer tests. All the results demonstrate the potential of the proposed wearable sensor as a new alternative for detecting and monitoring real-time respiratory rates with general applicability and sensitivity.

Ultra-thin atom layer deposited alumina film enables the precise lifetime control of fully biodegradable electronic devices.

Atomic layer deposited (ALD) ultra-thin alumina film is proposed to control the operational lifetimes of fully biodegradable (FB-) surface sensitive surface acoustic wave (SAW) devices. SAW devices encapsulated with conventional thick organic materials fail to function effectively, while devices with an ultra-thin alumina encapsulation layer (AEL) function normally with high performance. After being subjected to degradation in water, a FB-SAW device with no AEL starts to degrade immediately and fails within 8 h, due to dissolution of the tungsten electrode and piezoelectric material (ZnO). The coating of an ultra-thin AEL on the surfaces prevents SAW devices from undergoing degradation in water and enables SAW devices to perform normally before the AEL is dissolved. The stable operation lifetimes of SAW devices are linearly dependent on the AEL thickness, thus allowing for the design of devices with precisely controlled operational lifetimes and degradation times. The results show that all the materials used could be degraded; also, in vitro cytotoxicity tests indicate that the encapsulated FB-SAW devices are biocompatible, and cells can adhere and proliferate on them normally, demonstrating great potential for broader biodegradable electronic device applications.

Transient Resistive Switching Devices Made from Egg Albumen Dielectrics and Dissolvable Electrodes.

Egg albumen as the dielectric, and dissolvable Mg and W as the top and bottom electrodes are used to fabricate water-soluble memristors. 4 × 4 cross-bar configuration memristor devices show a bipolar resistive switching behavior with a high to low resistance ratio in the range of 1 × 10(2) to 1 × 10(4), higher than most other biomaterial-based memristors, and a retention time over 10(4) s without any sign of deterioration, demonstrating its high stability and reliability. Metal filaments accompanied by hopping conduction are believed to be responsible for the switching behavior of the memory devices. The Mg and W electrodes, and albumen film all can be dissolved in water within 72 h, showing their transient characteristics. This work demonstrates a new way to fabricate biocompatible and dissolvable electronic devices by using cheap, abundant, and 100% natural materials for the forthcoming bioelectronics era as well as for environmental sensors when the Internet of things takes off.

High sensitivity flexible Lamb-wave humidity sensors with a graphene oxide sensing layer.

This paper reports high performance flexible Lamb wave humidity sensors with a graphene oxide sensing layer. The devices were fabricated on piezoelectric ZnO thin films deposited on flexible polyimide substrates. Two resonant peaks, namely the zero order antisymmetric (A0) and symmetric (S0) mode Lamb waves, were observed and fitted well with the theoretical analysis and modelling. With graphene oxide microflakes as the sensing layer, the sensing performance of both wave modes was investigated. The humidity sensitivity of the A0 mode is 145.83 ppm per %RH (at humidity 85%RH), higher than that of S0 mode of 89.35 ppm per %RH. For the first time, we have demonstrated that the flexible humidity sensors work as usual without noticeable deterioration in performance even under severe bending conditions up to 1500 µÎµ. Also the sensors showed an excellent stability upon repeated bending for thousand times. All the results demonstrated that the Lamb wave flexible humidity sensors have a great potential for application in flexible electronics.