Nanoskiving of van der Waals Materials toward Edge/Basal Plane Contact Heterojunctions for High-Performance Photodetection.

The unique features of edges in van der Waals materials may lead to edge-basal plane contacts that could provide new opportunities for electronic and optoelectronic devices. However, few studies have addressed edge/basal plane contact heterojunctions owing to the formidable challenges in integrating edges with the basal plane to form a heterojunction. Here, taking the example of black phosphorus (BP)/ReS2, a heterojunction with contact between the edge and the basal plane was successfully achieved by the introduction of a nanoskiving technique to fabricate BP edges with controlled orientation, followed by the dry transfer of a ReS2 flake. The deformation of BP during the nanoskiving process was clearly revealed, where interlayer slipping in the BP determined the formation of the edges. The edge/basal plane contact heterojunctions based on BP/ReS2 exhibited a reverse-rectifying behavior upon contact, and a high rectifying current was attributed to direct tunneling and Fowler-Nordheim tunneling in low and high bias regimes, respectively. As a photodetector, the heterojunction diode demonstrated an impressive responsivity of 65 A/W, a rapid response time (<10 ms), and polarization-sensitive detection under 532 nm illumination without gate biasing.

Periodic Folded Gold Nanostructures with a Sub-10 nm Nanogap for Surface-Enhanced Raman Spectroscopy.

Surface-enhanced Raman spectroscopy has emerged as a powerful spectroscopy technique for detection with its capacity for label-free, nondestructive analysis, and ultrasensitive characterization. High-performance surface-enhanced Raman scattering (SERS) substrates with homogeneity and low cost are the key factors in chemical and biomedical analysis. In this study, we propose the technique of atomic force microscopy (AFM) scratching and nanoskiving to prepare periodic folded gold (Au) nanostructures as SERS substrates. Initially, folded Au nanostructures with tunable nanogaps and periodic structures are created through the scratching of Au films by AFM, the deposition of Ag/Au films, and the cutting of epoxy resin, reducing fabrication cost and operational complexity. Periodic folded Au nanostructures show the three-dimensional nanofocusing effect, hotspot effect, and standing wave effect to generate an extremely high electromagnetic field. As a typical molecule to be tested, p-aminothiophenol has the lowest detection limit of up to 10-9 M, owing to the balance between the electromagnetic field energy concentration and the transmission loss in periodic folded Au nanostructures. Finally, by precisely controlling the periods and nanogap widths of the folded Au nanostructures, the synergistic effect of surface plasmon resonance is optimized and shows good SERS properties, providing a new strategy for the preparation of plasmonic nanostructures.

Exploring the structural color of micro-nano composite gratings with FDTD simulation and experimental validation.

The significance of micro-nano composite gratings (MNCGs) resides in their applications, including optical devices, sensors, and diffractive elements, which drive research interest in their diffraction characteristics. This study investigates both the diffraction characteristics of MNCGs and the factors that influence them by employing both Finite-Difference Time-Domain (FDTD) methods and experimental validation. The initial focus lies in deciphering the differences in diffraction characteristics between micro-gratings (MGs) and MNCGs by analyzing the coupling effects, diffraction order, color distribution, and intensity variation. Additionally, this research emphatically investigates five aspects to discover the influencing factors of MNCG's diffraction characteristics, such as the height, groove angle of MGs and the period, blaze angle, and height of nano-gratings (NGs). Results show that the structural coloration and saturation of MNCG surpass that of MG. NG plays the actual spectral role, and a reduction in the period of NG leads to enhanced splitting light capability of the white light. The optical detection tests validated the simulation results. The present study reveals the diffractive properties of MNCGs, providing technical insights for the design and processing of optically variable devices.

Local Nanostrain Engineering of Monolayer MoS2 Using Atomic Force Microscopy-Based Thermomechanical Nanoindentation.

Strain engineering in two-dimensional materials (2DMs) has important application potential for electronic and optoelectronic devices. However, achieving precise spatial control, adjustable sizing, and permanent strain with nanoscale resolution remains challenging. Herein, a thermomechanical nanoindentation method is introduced, inspired by skin edema caused by mosquito bites, which can induce localized nanostrain and bandgap modulation in monolayer molybdenum disulfide (MoS2) transferred onto a poly(methyl methacrylate) film utilizing a heated atomic force microscopy nanotip. Via adjustment of the machining parameters, the strains of MoS2 are manipulated, achieving an average strain of ≤2.6% on the ring-shaped expansion structure. The local bandgap of MoS2 is spatially modulated using three types of nanostructures. Among them, the nanopit has the largest range of bandgap regulation, with a substantial change of 56 meV. These findings demonstrate the capability of the proposed method to create controllable and reproducible nanostrains in 2DMs.

Morphology measurements by AFM tapping without causing surface damage: A phase shift characterization.

The morphology measurement of a surface can be done by using an atomic force microscope (AFM). However, it is difficult to ensure that the measurement does not introduce any damage to the sample surface. This paper proposes that phase shift, the phase change between the original surface and scanned area, can provide a characteristic signal of the tip-surface interaction. On a poly (methyl methacrylate) thin film, the present investigation explored the relationship between phase shift and nondestructive surface morphology measurement under the tapping mode of an AFM. The study showed that when the drive amplitude was doubled, the phase shift reached from 0.47° to 1.85°. Under this condition, wrinkles became observable. With the tip radius in the range of 15-20 nm, no phase shift appeared between a scanned area and the original surface after multiple measurements. In this case, the tip-surface energy dissipation was in the range of 10-35 eV, showing a nondestructive interaction of the surface with the AFM tip. When the tip radius was about 55 nm, under the same tip excitation parameters, the energy dissipation per tap varied from 60 to 110 eV, and a phase shift occurred in the range of 0.02-0.64°, while the surface plastic deformation was still extremely minor after multiple tip scanning. A higher phase shift was occurred on the softer surface attributed to multiple scanning under tapping mode. The study found that the phase shift characteristics was a more sensible measure to signify the transition from a nondestructive to a destructive surface morphology measurement by using the tapping mode of an AFM.

A probe-based nanometric morphology measurement system using intermittent-contact mode.

In the present study, a homemade probe-based nanometric morphology measurement system is proposed, which can be easily integrated with other probes, such as a diamond probe and an electrochemical electrode. In this system, an intermittent-contact mode is adopted, which is based on a set of micro-force servo modules. The micro-force serve module is mainly composed of a piezoelectric ceramic transducer, a capacitive displacement sensor, an excitation piezoelectric ceramic ring, and a four-beam spring. The four-beam spring integrated with a diamond probe is driven by the excitation piezoelectric ceramic ring. The mechanical structure and the control system of the measurement system are also designed. The vibration amplitude and the resolution of a normal load are calibrated during the engagement process under open-loop control. Moreover, the optimal values for parameters P, I, and D are obtained for the closed-loop measurement. The performance of the developed system is verified by measuring a standard sample. The measured depths agree well with the results obtained by commercial atomic force microscopy. The developed system can be used to measure nanostructures with high precision.

Comparison of the Indentation Processes Using the Single Indenter and Indenter Array: A Molecular Dynamics Study.

Fabrication of periodic nanostructures has drawn increasing interest owing to their applications of such functional structures in optics, biomedical and power generation devices. Nano-indentation technique has been proven as a method to fabricate periodic nanostructures. In this study, the molecular dynamic simulation approach is employed to investigate the nano-indentation process for fabricating periodic nano-pit arrays using a single indenter and an indenter array. The morphologies of indentations that machined using these two kinds of indenters are compared. The indentation force and the defect evolution during the nano-indentation process are further studied. Results show that indentation morphologies obtained by single indenter are mainly depended on the spacing of indenters, and a nano-pit array with a better shape and consistency can be obtained easier using the indenter array compared with using a single indenter. The stacking faults and dislocations induced by indentation are depended on the spacing of the indenters. Our findings are significant for understanding the differences of indentation processes using a single indenter and an indenter array and machining a high-quality periodic nano-pit array with high machining efficiency.

Scanning Probe Lithography: State-of-the-Art and Future Perspectives.

High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning probe lithography (SPL) nanofabrication technique is a critical nanofabrication method with great potential to evolve into a disruptive atomic-scale fabrication technology to meet these demands. Through this timely review, we aspire to provide an overview of the SPL fabrication mechanism and the state-the-art research in this area, and detail the applications and characteristics of this technique, including the effects of thermal aspects and chemical aspects, and the influence of electric and magnetic fields in governing the mechanics of the functionalized tip interacting with the substrate during SPL. Alongside this, the review also sheds light on comparing various fabrication capabilities, throughput, and attainable resolution. Finally, the paper alludes to the fact that a majority of the reported literature suggests that SPL has yet to achieve its full commercial potential and is currently largely a laboratory-based nanofabrication technique used for prototyping of nanostructures and nanodevices.

The effects of the formation of a multi-scale reinforcing phase on the microstructure evolution and mechanical properties of a Ti2AlC/TiAl alloy.

In order to acquire TiAl composites with a multi-scale reinforcing phase, and to improve the microstructure and tensile properties at elevated temperatures, TiAl alloys have been prepared with different added carbon content levels via vacuum arc melting. The results show that when the carbon content is greater than or equal to 1.0 at%, then Ti2AlC forms and the microstructure changes from having a dendrite morphology to an equiaxed crystal morphology. The B2 phase disappears in the Ti2AlC-containing alloys. As the carbon content increases from 0 to 3.0 at%, the lamellar colony size decreases from 148.4 to 32.8 µm and the lamellar width decreases from 441.2 to 117.6 nm. More nanoscale Ti2AlC particles form in the α2 lamellae at a higher carbon content, and there are a lot of dislocations around them. As the carbon content, the Ti2AlC content increases from 0 to 16.8 vol% and the length-diameter ratio decreases from 9.2 to 1.8. The reason for the microstructure refinement is that carbon and carbide act as heterogeneous particles during solidification, and carbide dissolves some alloy elements, improving the microstructure uniformity. Compressive testing shows that the maximum compressive strength is 2324.3 MPa at a carbon content of 1.5%. At a carbon content of 2.5%, the compression strain is higher (28.1%). Tensile testing at elevated temperatures shows that upon increasing the temperature from 750 to 850 °C, the tensile strength increases from 398 to 541 MPa, and the strain increases from 6.1 to 12.2% with a temperature increase from 750 to 950 °C. The increase in the mechanical properties is attributed to the refined lamellar colonies and lamellar width, the solid solution of elements, and the formation of nanoprecipitates.

Molecular Dynamics Study on Tip-Based Nanomachining: A Review.

Tip-based nanomachining (TBN) approaches has proven to be a powerful and feasible technique for fabrication of microstructures. The molecular dynamics (MD) simulation has been widely applied in TBN approach to explore the mechanism which could not be fully revealed by experiments. This paper reviews the recent scientific progress in MD simulation of TBN approach. The establishing methods of the simulation model for various materials are first presented. Then, the analysis of the machining mechanism for TBN approach is discussed, including cutting force analysis, the analysis of material removal, and the defects analysis in subsurface. Finally, current shortcomings and future prospects of the TBN method in MD simulations are given. It is hopeful that this review can provide certain reference for the follow-up research.

Direct Nanomachining on Semiconductor Wafer By Scanning Electrochemical Microscopy.

Scanning electrochemical microscopy (SECM) is one of the most important instrumental methods of modern electrochemistry due to its high spatial and temporal resolution. We introduced SECM into nanomachining by feeding the electrochemical modulations of the tip electrode back to the positioning system, and we demonstrated that SECM is a versatile nanomachining technique on semiconductor wafers using electrochemically induced chemical etching. The removal profile was correlated to the applied tip current when the tip was held stationary and when it was moving slowly (<20 µm s-1 ), and it followed Faraday's law. Both regular and irregular nanopatterns were translated into a spatially distributed current by the homemade digitally controlled SECM instrument. The desired nanopatterns were "sculpted" directly on a semiconductor wafer by SECM direct-writing mode. The machining accuracy was controlled to the sub-micrometer and even nanometer scales. This advance is expected to play an important role in electrochemical nanomachining for 3D micro/nanostructures in the semiconductor industry.

Mechanical properties of gold nanowires prepared by nanoskiving approach.

The nanoskiving method based on nanocutting process is a new, low cost and easy way to machine nanowires. In this study, this technique is used to machine Au nanowires with different cutting directions and depths. Young's modulus and the yield strength of nanowires are then measured by an atomic force microscope-based three-point bending test. Results show that the Young's modulus of nanowires is independent of size and is not affected by cutting directions. However, the yield strength of nanowires machined by parallel cutting (NWs-b) is 42-64% higher than that machined by perpendicular cutting (NWs-a).

Nano/Microscale Thermal Field Distribution: Conducting Thermal Decomposition of Pyrolytic-Type Polymer by Heated AFM Probes.

In relevant investigations and applications of the heated atomic force microscope (AFM) probes, the determination of the actual thermal distribution between the probe and the materials under processing or testing is a core issue. Herein, the polyphthalaldehyde (PPA) film material and AFM imaging of the decomposition structures (pyrolytic region of PPA) were utilized to study the temperature distribution in the nano/microscale air gap between heated tips and materials. Different sizes of pyramid decomposition structures were formed on the surface of PPA film by the heated tip, which was hovering at the initial tip-sample contact with the preset temperature from 190 to 220 °C for a heating duration ranging from 0.3 to 120 s. According to the positions of the 188 °C isothermal surface in the steady-state probe temperature fields, precise 3D boundary conditions were obtained. We also established a simplified calculation model of the 3D steady-state thermal field based on the experimental results, and calculated the temperature distribution of the air gap under any preset tip temperature, which revealed the principle of horizontal (<700 nm) and vertical (<250 nm) heat transport. Based on our calculation, we fabricated the programmable nano-microscale pyramid structures on the PPA film, which may be a potential application in scanning thermal microscopy.

A coupled model of electromagnetic and heat on nanosecond-laser ablation of impurity-containing aluminum alloy.

In the emerging field of laser-driven inertial confinement fusion, Joule heating generated via electromagnetic heating of the metal frame is a critical issue. However, there are few reported models explaining thermal damage to the aluminum alloy. The aim of this study was to build a coupled model for electromagnetic radiation and heat conversion of an ultrashort laser pulse on an aluminum alloy based on Ohm's law. Additionally, the application SiO2 films on aluminum alloy to improve the laser-induced damage threshold (LIDT) were simulated, and the effects of metal impurities in the aluminum alloy were analyzed. A model examining the relation between electromagnetic radiation and heat for a nanosecond laser irradiating an aluminum alloy was developed using a coupled model equation. The results obtained using the finite difference time domain (FDTD) algorithm can provide a theoretical basis for future improvement of the aluminum alloy LIDT.

Scratch on Polymer Materials Using AFM Tip-Based Approach: A Review.

As a brand new nanomachining method, the tip-based nanomachining/nanoscratching (TBN) method has exhibited a powerful ability at machining on polymer materials and various structures have been achieved using this approach, ranging from the nanodot, nanogroove/channel, bundle to 2D/3D (three-dimensional) nanostructures. The TBN method is widely used due to its high precision, ease of use and low environmental requirements. First, the theoretical models of machining on polymer materials with a given tip using the TBN method are presented. Second, advances of nanostructures achieved by this method are given, including nanodots/nanodot arrays, a nanogroove/channel, 2D/3D nanostructures and bundles. In particular, a useful approach called the ultrasonic vibration-assisted method introduced to integrate with TBN method to reduce the wear of the tip is also reviewed, respectively. Third, the typical applications of the TBN method and the nanostructures achieved by it are summarized in detail. Finally, the existing shortcomings and future prospects of the TBN method are given. It is confirmed that this review will be helpful in learning about this method and push the technology toward industrialization.

Three-dimensional paper based platform for automatically running multiple assays in a single step.

Paper based assays are paving the way to automated, simplified, robust and cost-effective point of care testing (POCT). We propose a method for fabricating three dimensional (3D) microfluidic paper based analytical devices (µPADs) via combining thin adhesive films and paper folding, which avoids the use of cellulose powders and the complex folding sequence and simultaneously permits assays in several layers. To demonstrate the effectiveness of this approach, a 3DµPADs was designed to conduct more assays on a small footprint, allowing dual colorimetric and electrochemical detections. More importantly, we further developed a 3D platform for implementing automated and multiplexed ELISA in parallel, since ELISA, a routine and standard laboratory method, has rarely been used in practical analyses outside of the laboratory. In this configuration, complex and multistep diagnostic assays can be carried out with the addition of the sample and buffer in a simple fashion. Using Troponin I as model, the device showed a broad dynamic range of detection with a detection limit of 0.35 ng/mL. Thus, the developed platforms allow for various assays to be cost-effectively carried out on a single 3D device, showing great potential in an academic setting and point of care testing under resource-poor conditions.

Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process.

In current research realm, polydimethylsiloxane (PDMS)-based nanofluidic devices are widely used in medical, chemical, and biological applications. In the present paper, a novel nanomilling technique (consisting of an AFM system and a piezoelectric actuator) was proposed to fabricate nanochannels (with controllable sizes) on PDMS chips, and nanochannel size was controlled by the driving voltage and frequency inputted to the piezoelectric actuator. Moreover, microchannel and nanochannel molds were respectively fabricated by UV lithography and AFM tip-based nanomilling, and finally, PDMS slabs with micro/nanochannels were obtained by transfer process. The influences of PDMS weight ratio on nanochannel size were also investigated. The bonding process of microchannel and nanochannel slabs was conducted on a homemade alignment system consisted of an optical monocular microscope and precision stages. Furthermore, the effects of nanochannel size on electrical characteristics of KCl solution (concentration of 1 mM) were analyzed. Therefore, it can be concluded that PDMS nanofluidic devices with multiple nanochannels of sub-100-nm depth can be efficiently and economically fabricated by the proposed method.

Nanofluidic devices prepared by an atomic force microscopy-based single-scratch approach.

Nanofluidic chips with different numbers of nanochannels were fabricated based on a commercial AFM system using a single-scratch approach. The electrical characterization and enzymatic reactions at the nanoscale were demonstrated using the obtained chips. The effects of the number of nanochannels and the solution concentration on the measured electric current were investigated. The influence of the hydrodynamic convection generated from the induced inflow at the end of the nanochannel on the ion transport through the nanochannel was also studied. Moreover, the enzymatic reactions for trypsin towards poly-l-lysine (PLL) or thrombin were conducted with a nanofluidic chip to investigate the reaction specificity between trypsin and PLL. Results show that the electric current change during the experimental process could be used as a label-free indicator to detect the enzymatic activity.

Label-free highly sensitive probe detection with novel hierarchical SERS substrates fabricated by nanoindentation and chemical reaction methods.

Nanostructures have been widely employed in surface-enhanced Raman scattering (SERS) substrates. Recently, in order to obtain a higher enhancement factor at a lower detection limit, hierarchical structures, including nanostructures and nanoparticles, appear to be viable SERS substrate candidates. Here we describe a novel method integrating the nanoindentation process and chemical redox reaction to machine a hierarchical SERS substrate. The micro/nanostructures are first formed on a Cu(110) plane and then Ag nanoparticles are generated on the structured copper surface. The effect of the indentation process parameters and the corrosion time in the AgNO3 solution on the Raman intensities of the SERS substrate with hierarchical structures are experimentally studied. The intensity and distribution of the electric field of single and multiple Ag nanoparticles on the surface of a plane and with multiple micro/nanostructures are studied with COMSOL software. The feasibility of the hierarchical SERS substrate is verified using R6G molecules. Finally, the enhancement factor using malachite green molecules was found to reach 5.089 × 109, which demonstrates that the production method is a simple, reproducible and low-cost method for machining a highly sensitive, hierarchical SERS substrate.

A novel AFM-based 5-axis nanoscale machine tool for fabrication of nanostructures on a micro ball.

This paper presents a novel atomic force microscopy (AFM)-based 5-axis nanoscale machine tool developed to fabricate nanostructures on different annuli of the micro ball. Different nanostructures can be obtained by combining the scratching trajectory of the AFM tip with the movement of the high precision air-bearing spindle. The center of the micro ball is aligned to be coincided with the gyration center of the high precision to guarantee the machining process during the rotating of the air-bearing spindle. Processing on different annuli of the micro ball is achieved by controlling the distance between the center of the micro ball and the rotation center of the AFM head. Nanostructures including square cavities, circular cavities, triangular cavities, and an annular nanochannel are machined successfully on the three different circumferences of a micro ball with a diameter of 1500 µm. Moreover, the influences of the error motions of the high precision air-bearing spindle and the eccentric between the micro ball and the gyration center of the high precision air-bearing spindle on the processing position error on the micro ball are also investigated. This proposed machining method has the potential to prepare the inertial confinement fusion target with the expected dimension defects, which would advance the application of the AFM tip-based nanomachining approach.