Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination.

We report the demonstration of a reflection microscope that operates at 13.2 nm wavelength with a spatial resolution of 55+/-3 nm. The microscope uses illumination from a tabletop extreme ultraviolet laser to acquire aerial images of photolithography masks with a 20 s exposure time. The modulation transfer function of the optical system was characterized.

Single-cycle nonlinear optics.

Nonlinear optics plays a central role in the advancement of optical science and laser-based technologies. We report on the confinement of the nonlinear interaction of light with matter to a single wave cycle and demonstrate its utility for time-resolved and strong-field science. The electric field of 3.3-femtosecond, 0.72-micron laser pulses with a controlled and measured waveform ionizes atoms near the crests of the central wave cycle, with ionization being virtually switched off outside this interval. Isolated sub-100-attosecond pulses of extreme ultraviolet light (photon energy approximately 80 electron volts), containing approximately 0.5 nanojoule of energy, emerge from the interaction with a conversion efficiency of approximately 10(-6). These tools enable the study of the precision control of electron motion with light fields and electron-electron interactions with a resolution approaching the atomic unit of time ( approximately 24 attoseconds).

Nanometer-scale ablation with a table-top soft x-ray laser.

Ablation of holes with diameters as small as 82 nm and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar 46.9 nm compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.

Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light.

We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution.

Spatial coherence measurements of a 13.2 nm transient nickel-like cadmium soft x-ray laser pumped at grazing incidence.

The spatial coherence of a 13.2 nm transient collisional Ni-like Cd soft X-ray laser pumped at 23 degrees grazing incidence was measured in a series of Young's double-slit experiments. We observed pronounced fringe visibility variations associated with microstructures in the beam's intensity profile. The transverse coherence length was measured to be about 1/20 of the beam diameter and did not significantly improve with longer plasma columns. The equivalent incoherent source size is determined to be 10 mum and the laser's peak spectral brightness ~ 3 x 10(23) photons/sec/mm(2)/mrad(2) within less than 0.01% spectral bandwidth.

Nanoimaging with a compact extreme-ultraviolet laser.

Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a free-standing imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.

Highly coherent light at 13 nm generated by use of quasi-phase-matched high-harmonic generation.

By measuring the fringe visibility in a Young's double pinhole experiment, we demonstrate that quasi-phase-matched high-harmonic generation produces beams with very high spatial coherence at wavelengths around 13 nm. To our knowledge these are the highest spatial coherence values ever measured at such short wavelengths from any source without spatial filtering. This results in a practical, small-scale, coherent, extreme-ultraviolet source that is useful for applications in metrology, imaging, and microscopy.

Absolute determination of the wavelength and spectrum of an extreme-ultraviolet beam by a Young's double-slit measurement.

The interference pattern produced by irradiation of a pair of pinholes with a beam contains information on both the spatial and the temporal coherence properties of the beam, as well as its power spectrum. We demonstrate experimentally for what is believed to be the first time that the spectrum of an extreme-ultraviolet (EUV) beam can be obtained from a measurement of the interference pattern produced by a pinhole pair. This approach offers a convenient method of making absolute wavelength and relative spectral intensity calibrations in the EUV.

Resolution determination in X-ray microscopy: an analysis of the effects of partial coherence and illumination spectrum.

Determining the resolution of a zone plate X-ray microscope is a complicated issue, depending on many factors in addition to the quality of the optic. These include the degree of coherence of the illumination, the illumination spectrum, and the nature of the resolution test object. In this paper, we examine closely how the degree of coherence of the illumination affects the resolution as measured with three typical test patterns. In addition, we determine the extent to which the illumination spectrum affects the resolution. We compare X-ray microscope test images to numerical simulations as a function of coherence and illumination spectrum. We are able to conclude that in these experiments, the resolution of the X-ray microscope is 41 nm, or 40% discrepancy is due to aberrations in the objective zone plate lens.

X-ray laser microscopy of rat sperm nuclei.

The development of high brightness and short pulse width (< 200 picoseconds) x-ray lasers now offers biologists the possibility of high-resolution imaging of specimens in an aqueous environment without the blurring effects associated with natural motions and chemical erosion. As a step toward developing the capabilities of this type of x-ray microscopy, a tantalum x-ray laser at 44.83 angstrom wavelength was used together with an x-ray zone plate lens to image both unlabeled and selectively gold-labeled dried rat sperm nuclei. The observed images show approximately 500 angstrom features, illustrate the importance of x-ray microscopy in determining chemical composition, and provide information about the uniformity of sperm chromatin organization and the extent of sperm chromatin hydration.

Demonstration of x-ray microscopy with an x-ray laser operating near the carbon K edge.

High-brightness and short-pulse-width ( approximately 200 ps) x-ray lasers offer biologists the possibility of high-resolution three-dimensional imaging of specimens in an aqueous environment without the blurring effects associated with natural motions. As a first step toward developing the capabilities of this type of x-ray microscopy we have used a tantalum x-ray laser (lambda = 4.483 nm) together with an x-ray zone plate lens to image a test pattern. The observed image shows a detector-limited resolution of approximately 75 nm and paves the way to three dimensional biological imaging with high spatial resolution (20-30 nm).

Composite x-ray pinholes for time-resolved microphotography of laser compressed targets.

Composite x-ray pinholes having dichroic properties are presented. These pinholes permit both x-ray imaging and visible alignment with micron accuracy by presenting different apparent apertures in these widely disparate regions of the spectrum. Their use is mandatory in certain applications in which the x-ray detection consists of a limited number of resolvable elements whose use one wishes to maximize. Mating the pinhole camera with an x-ray streaking camera is described, along with experiments which spatially and temporally resolve the implosion of laser irradiated targets.